JPS6410641U - - Google Patents

Info

Publication number

JPS6410641U

JPS6410641U JP10546387U JP10546387U JPS6410641U JP S6410641 U JPS6410641 U JP S6410641U JP 10546387 U JP10546387 U JP 10546387U JP 10546387 U JP10546387 U JP 10546387U JP S6410641 U JPS6410641 U JP S6410641U

Authority

JP

Japan

Prior art keywords

pressure

nipple

semiconductor

sensor element

introduces

Prior art date

1987-07-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 210000002445 nipple Anatomy 0.000 claims description 3
• 239000004065 semiconductor Substances 0.000 claims description 3
• YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 2
• 229910052731 fluorine Inorganic materials 0.000 claims description 2
• 239000011737 fluorine Substances 0.000 claims description 2
• 238000001514 detection method Methods 0.000 claims 1