JPS6410626U - - Google Patents
Info
- Publication number
- JPS6410626U JPS6410626U JP10395587U JP10395587U JPS6410626U JP S6410626 U JPS6410626 U JP S6410626U JP 10395587 U JP10395587 U JP 10395587U JP 10395587 U JP10395587 U JP 10395587U JP S6410626 U JPS6410626 U JP S6410626U
- Authority
- JP
- Japan
- Prior art keywords
- vibration
- chamber
- diaphragm
- light window
- upper chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10395587U JPS6410626U (es) | 1987-07-08 | 1987-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10395587U JPS6410626U (es) | 1987-07-08 | 1987-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6410626U true JPS6410626U (es) | 1989-01-20 |
Family
ID=31335243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10395587U Pending JPS6410626U (es) | 1987-07-08 | 1987-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410626U (es) |
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1987
- 1987-07-08 JP JP10395587U patent/JPS6410626U/ja active Pending