JPS6410078U - - Google Patents

Info

Publication number
JPS6410078U
JPS6410078U JP10347787U JP10347787U JPS6410078U JP S6410078 U JPS6410078 U JP S6410078U JP 10347787 U JP10347787 U JP 10347787U JP 10347787 U JP10347787 U JP 10347787U JP S6410078 U JPS6410078 U JP S6410078U
Authority
JP
Japan
Prior art keywords
boat
operating rod
rod
lid
transport device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10347787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523582Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10347787U priority Critical patent/JPH0523582Y2/ja
Publication of JPS6410078U publication Critical patent/JPS6410078U/ja
Application granted granted Critical
Publication of JPH0523582Y2 publication Critical patent/JPH0523582Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP10347787U 1987-07-06 1987-07-06 Expired - Lifetime JPH0523582Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10347787U JPH0523582Y2 (enrdf_load_stackoverflow) 1987-07-06 1987-07-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10347787U JPH0523582Y2 (enrdf_load_stackoverflow) 1987-07-06 1987-07-06

Publications (2)

Publication Number Publication Date
JPS6410078U true JPS6410078U (enrdf_load_stackoverflow) 1989-01-19
JPH0523582Y2 JPH0523582Y2 (enrdf_load_stackoverflow) 1993-06-16

Family

ID=31334346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10347787U Expired - Lifetime JPH0523582Y2 (enrdf_load_stackoverflow) 1987-07-06 1987-07-06

Country Status (1)

Country Link
JP (1) JPH0523582Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0523582Y2 (enrdf_load_stackoverflow) 1993-06-16

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