JPS6399753U - - Google Patents
Info
- Publication number
- JPS6399753U JPS6399753U JP19515186U JP19515186U JPS6399753U JP S6399753 U JPS6399753 U JP S6399753U JP 19515186 U JP19515186 U JP 19515186U JP 19515186 U JP19515186 U JP 19515186U JP S6399753 U JPS6399753 U JP S6399753U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- metal member
- ion beam
- surround
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 6
- 238000010884 ion-beam technique Methods 0.000 claims description 4
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19515186U JPS6399753U (th) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19515186U JPS6399753U (th) | 1986-12-18 | 1986-12-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6399753U true JPS6399753U (th) | 1988-06-28 |
Family
ID=31152777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19515186U Pending JPS6399753U (th) | 1986-12-18 | 1986-12-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6399753U (th) |
-
1986
- 1986-12-18 JP JP19515186U patent/JPS6399753U/ja active Pending