JPS6399249U - - Google Patents
Info
- Publication number
- JPS6399249U JPS6399249U JP19645686U JP19645686U JPS6399249U JP S6399249 U JPS6399249 U JP S6399249U JP 19645686 U JP19645686 U JP 19645686U JP 19645686 U JP19645686 U JP 19645686U JP S6399249 U JPS6399249 U JP S6399249U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- support substrate
- temperature sensor
- film pattern
- film temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 230000020169 heat generation Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19645686U JPS6399249U (cs) | 1986-12-18 | 1986-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19645686U JPS6399249U (cs) | 1986-12-18 | 1986-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6399249U true JPS6399249U (cs) | 1988-06-27 |
Family
ID=31155293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19645686U Pending JPS6399249U (cs) | 1986-12-18 | 1986-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6399249U (cs) |
-
1986
- 1986-12-18 JP JP19645686U patent/JPS6399249U/ja active Pending