JPS6399083U - - Google Patents

Info

Publication number
JPS6399083U
JPS6399083U JP19505186U JP19505186U JPS6399083U JP S6399083 U JPS6399083 U JP S6399083U JP 19505186 U JP19505186 U JP 19505186U JP 19505186 U JP19505186 U JP 19505186U JP S6399083 U JPS6399083 U JP S6399083U
Authority
JP
Japan
Prior art keywords
port
valve
passage
cylinder
bypass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19505186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0325481Y2 (US07202987-20070410-C00007.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19505186U priority Critical patent/JPH0325481Y2/ja
Publication of JPS6399083U publication Critical patent/JPS6399083U/ja
Application granted granted Critical
Publication of JPH0325481Y2 publication Critical patent/JPH0325481Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Fluid-Driven Valves (AREA)
JP19505186U 1986-12-17 1986-12-17 Expired JPH0325481Y2 (US07202987-20070410-C00007.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19505186U JPH0325481Y2 (US07202987-20070410-C00007.png) 1986-12-17 1986-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19505186U JPH0325481Y2 (US07202987-20070410-C00007.png) 1986-12-17 1986-12-17

Publications (2)

Publication Number Publication Date
JPS6399083U true JPS6399083U (US07202987-20070410-C00007.png) 1988-06-27
JPH0325481Y2 JPH0325481Y2 (US07202987-20070410-C00007.png) 1991-06-03

Family

ID=31152582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19505186U Expired JPH0325481Y2 (US07202987-20070410-C00007.png) 1986-12-17 1986-12-17

Country Status (1)

Country Link
JP (1) JPH0325481Y2 (US07202987-20070410-C00007.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7187011B2 (ja) * 2018-09-07 2022-12-12 株式会社フジキン アクチュエータ、バルブ、流体供給システム、および半導体製造装置

Also Published As

Publication number Publication date
JPH0325481Y2 (US07202987-20070410-C00007.png) 1991-06-03

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