JPS6398843A - Surface undulation measuring instrument - Google Patents

Surface undulation measuring instrument

Info

Publication number
JPS6398843A
JPS6398843A JP24463886A JP24463886A JPS6398843A JP S6398843 A JPS6398843 A JP S6398843A JP 24463886 A JP24463886 A JP 24463886A JP 24463886 A JP24463886 A JP 24463886A JP S6398843 A JPS6398843 A JP S6398843A
Authority
JP
Japan
Prior art keywords
focus
recording medium
gain
objective lens
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24463886A
Other languages
Japanese (ja)
Inventor
Naoki Kuwata
直樹 鍬田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP24463886A priority Critical patent/JPS6398843A/en
Publication of JPS6398843A publication Critical patent/JPS6398843A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
  • Optical Recording Or Reproduction (AREA)

Abstract

PURPOSE:To indirectly measure the quantity of surface undulation of a recording medium by multiplying the gain G of a servo circuit system and the gain of a focus actuator with a focus error signal S so as to obtain the displacement of an objective lens. CONSTITUTION:The focus actuator 13 included in an optical pickup has a transmission characteristic whose movement slows down as the frequency is increased even with the same voltage applied thereto. The displacement delta of an objective lens is expressed as delta=SG1G2(mum), where S(mV) is an error signal, G1 (mV/mV) is the combined gain of a phase compensating circuit 15 and an actuator driving circuit 16 and G2(mu/mV) is the gain of the actuator 13. On the other hand, since the objective lens in the optical pickup 11 follows the surface undulation of an optical recording medium 4, the displacement delta of an objective lens is equal to the surface undulation of the recording medium within the residual error. Since the focus servo residual error is usually 0.5mum or below, highly accurate measurement is attained.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、レーザー等の光を微小径のスポットに絞り、
情報を記録再生するときに用い6光学式記録媒体の面振
れhlを測定する装置に閃する。
[Detailed description of the invention] [Industrial field of application] The present invention focuses light such as a laser into a spot with a minute diameter,
This device is used to measure the surface runout hl of an optical recording medium used when recording and reproducing information.

〔従来の技術〕[Conventional technology]

υを来の面振れ測定装置の概略図を第5図に示す。1は
tl c −N cレーザー等の光源、2は反射ミラー
でレーザー光を記録媒体面4aへ人q1させる。3は集
光レンズで、レーザー光を記録媒体面」二に集光する。
Figure 5 shows a schematic diagram of the surface runout measuring device for measuring υ. 1 is a light source such as a tlc-Nc laser, and 2 is a reflecting mirror that directs the laser beam toward the recording medium surface 4a. 3 is a condensing lens that condenses the laser beam onto the recording medium surface.

4は光学式記し1媒体で、4a面が記録痕の付(1して
いる面である。レーザー光はこの面に焦点を結ぶ。記録
媒体4からの反射光は、集光レンズ5で集光され位置セ
ンサ6へ入q1する。今、図示のように、入射光束の入
射角θ。を集光し7 ス5 (D (f’(率m ニ対
し、  cosllo=1/JFTrにすると記録媒体
40面振れによって生じる反射光束の移動が31 Q媒
体面に平行になり、センナ6上での移動距離りと面振れ
量δとの関係は、t=2m5δ になる。
4 is an optical marking medium, and the surface 4a is the surface with recording marks (1).The laser beam is focused on this surface.The reflected light from the recording medium 4 is condensed by a condenser lens 5. The light enters the position sensor 6 q1. Now, as shown in the figure, the incident angle θ of the incident light beam is focused and recorded as The movement of the reflected light flux caused by the surface wobbling of the medium 40 becomes parallel to the 31Q medium surface, and the relationship between the moving distance on the sensor 6 and the amount of surface wobbling δ is t=2m5δ.

このようにして、センサ6上の光点の変位(から面慶れ
金6を測定することができる。
In this way, the surface displacement 6 can be measured from the displacement of the light spot on the sensor 6.

(発明が解決しようとする問題点〕 しかし、前述の従来技術では、記録媒体の上下振れに伴
い媒体面の傾きが生じ、反日1光束の変位を起こす可能
性がある。また、反射ミラー、集光レンズ、位置センサ
等の設定も困Δtであり、光学系の光路長が長いため経
時変化に弱いという問題点を仔していた。そこで本発明
はこのような問題点を解決するもので、その目的とする
ところは、媒体面の傾きの影響が少なく、構成が簡単な
面振れ測定装置dを提供することにある。
(Problems to be Solved by the Invention) However, in the above-mentioned conventional technology, the medium surface tilts due to vertical vibration of the recording medium, which may cause a displacement of one beam of sunlight. It is also difficult to set the optical lens, position sensor, etc., and the optical system has a long optical path length, making it susceptible to changes over time.The present invention is intended to solve these problems. The purpose is to provide a surface runout measuring device d that is less affected by the inclination of the medium surface and has a simple configuration.

〔問題点を解決するための手段〕[Means for solving problems]

本発明の面振れ測定装置は、情報を光学式記録媒体に記
録再生する光学ピックアップがフォーカスサーボを行っ
ている時、この光学ピックアップからフォーカス誤差信
号を取出し、この誤差信号Sにサーボ回路系のゲインG
IN フォーカスアクチュエーターのゲインG、を乗す
ることに上り、面偏れ量δ=SG1G2を測定すること
を特徴とする。
The surface runout measuring device of the present invention extracts a focus error signal from the optical pickup when the optical pickup that records and reproduces information on an optical recording medium performs focus servo, and adds the gain of the servo circuit system to this error signal S. G
IN is multiplied by the gain G of the focus actuator, and the amount of surface deviation δ=SG1G2 is measured.

〔作用〕[Effect]

本発明の上記の構成によれば、フォーカスサーボにより
、対物し/ズが光学式記0媒体の面振れに追従している
ので、記録媒体の面振れ皿と対物レンズの変位置が等し
くなる。この対物レンズの変位置を、フォーカス誤差信
号Sにサーボ回路系のゲインG、およびフォーカスアク
チュエーターのゲインG、を乗ずることにより求め、間
接的に記録媒体の面振れfitを測定できる。
According to the above configuration of the present invention, since the objective lens follows the surface runout of the optical recording medium by the focus servo, the displacement positions of the surface runout plate of the recording medium and the objective lens become equal. The displacement position of the objective lens is determined by multiplying the focus error signal S by the gain G of the servo circuit system and the gain G of the focus actuator, and the surface runout fit of the recording medium can be indirectly measured.

〔実施例〕〔Example〕

第1図に本発明の面振れ測定装置の概略図を示す、11
は光学ピックアップで、スピンドルモータ(図示せず)
等で回転する光学式記録媒体4に、情報を記録再生する
。12は光学ピックアップ11に内包されているフォー
カス誤差信号検出光学系で、2;差信号の検出手段とし
ては、公知の非点収差法・臨界角法等を用いる。14は
誤差信号検出光学系12からの差信号を取ることにより
、フォーカス誤差信号を作り出す誤差信号生成回路であ
る。15は位相補償回路、1Gはアクチェエータ−駆動
回路である。アクチュエーター駆動回路16の出力がフ
ォーカスアクチュエータ−13へ伝達され、光学ピック
アップ11内の対物レンズを記録媒体4の面振れに追従
させる。
FIG. 1 shows a schematic diagram of the surface runout measuring device of the present invention.
is an optical pickup and a spindle motor (not shown)
Information is recorded and reproduced on the optical recording medium 4 which is rotated by the optical recording medium 4 and the like. Reference numeral 12 denotes a focus error signal detection optical system included in the optical pickup 11; 2; As a means for detecting a difference signal, a known astigmatism method, critical angle method, or the like is used. Reference numeral 14 denotes an error signal generation circuit that generates a focus error signal by taking the difference signal from the error signal detection optical system 12. 15 is a phase compensation circuit, and 1G is an actuator drive circuit. The output of the actuator drive circuit 16 is transmitted to the focus actuator 13 to cause the objective lens in the optical pickup 11 to follow the surface deflection of the recording medium 4.

光学ピックアップ11が記録もしくは再生動作を行って
いるときに、フォーカス誤差信号を第1図のAより取出
し、この信号をFFTアナライザで測定したものを第2
図に示す。第2図において、横611は周波数(]−1
z ) 、縦軸は誤着信号電圧(mV)である、この図
上り、ある周波数において、どれ位の誤差信号が生じて
いるかよく解る。
When the optical pickup 11 is performing a recording or reproducing operation, a focus error signal is extracted from A in FIG.
As shown in the figure. In Fig. 2, the horizontal 611 is the frequency (]-1
z), and the vertical axis is the error signal voltage (mV). From this figure, it is easy to see how much error signal is occurring at a certain frequency.

この信号を位相補償回路15、アクチュエーター駆動回
路1Gで増幅し、フォーカスアクチュエータ−13を駆
動させる。
This signal is amplified by the phase compensation circuit 15 and the actuator drive circuit 1G to drive the focus actuator 13.

第3図は、光学ピックアップ11に内包されているフォ
ーカスアクチュエーター13の伝達特性で、横軸は周波
数(H2)%縦軸はゲイン〔μm/mV)である。この
ように、アクチュエーターは同じ電圧を印加しても周波
数が高くなるにつれて動きにくくなる。
FIG. 3 shows the transfer characteristics of the focus actuator 13 included in the optical pickup 11, where the horizontal axis is frequency (H2) and the vertical axis is gain [μm/mV]. In this way, the actuator becomes more difficult to move as the frequency increases even if the same voltage is applied.

今、誤差信号をS (mV) 、位相補償回路15とア
クチュエーター駆動回路16のゲインを合わせて(z 
 (mV/mV) 、アクチュエータ−13のゲインを
G、Cμm/mV)とすると、対物レンズの変位置δは
、δ=SGIG、Cμm)となる、前述のように、光学
ピックアップ11内の対物レンズは、フォーカスサーボ
動作のために光学式記録媒体4の而振れに追従している
ので、対物レンズの変位j1δがサーボ残佼内でff2
0媒体4の面振れ量に等しくなる。この上うにして求め
た光学式記り媒体の面振れ量のスペクトルを第4図に示
す、第4ヌ1において、横軸は周波数(Hz )、縦へ
11は面顕れ景〔μm〕を表わす。通常、フォーカスサ
ーボ残差は0.5μm以下なので、上記のような信f単
なl:i成で非゛;δ′に高精度な測定が行なえる。
Now, the error signal is S (mV), the gains of the phase compensation circuit 15 and the actuator drive circuit 16 are combined (z
(mV/mV), and the gain of the actuator 13 is G, Cμm/mV), then the displacement position δ of the objective lens is δ=SGIG,Cμm).As mentioned above, the objective lens in the optical pickup 11 follows the vibration of the optical recording medium 4 for the focus servo operation, so the displacement j1δ of the objective lens becomes ff2 within the servo residual space.
0 is equal to the amount of surface runout of medium 4. The spectrum of the amount of surface runout of the optical recording medium obtained in this manner is shown in FIG. represent. Normally, the focus servo residual error is 0.5 μm or less, so the simple l:i configuration described above allows for highly accurate measurement of the difference δ′.

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明によれば、記O媒体の傾斜に対
して影1されに(り、通算°の光学ピックアップを用い
るので光学的設定も容易であり、経時変化にも強い、ま
た、測定精度がフォーカスサーボの誤ff1(0,5μ
m程度)以下となるので、他の装置と比べて非常に高精
度である。
As described above, according to the present invention, since the optical pickup is used, the optical setting is easy, and it is resistant to changes over time. The measurement accuracy is due to focus servo error ff1 (0.5μ
The accuracy is extremely high compared to other devices.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の面taれ測定装置の概略図、第2図は
誤差信号のパワースペクトラムを示す図、第3図はアク
チュエーターの伝達特性図、第4図は記録媒体の而振れ
皿のスペクトル図、第5図は従来の面※れ測定装置の概
略図である。 l・・・光源、2・・・反射ミラー、3・5・・・集光
レンで、4・・・光学式記Ra体、6・・・位置センサ
、7・・・記録媒体1.M定置、11・・・光学ピック
アップ、12・・・フォーカス誤差信号検出光学系、1
3・・・フォーカスアクヂュエーター、!4・・・、娯
差fM号生成回路、15・・・位相補償回路、16・・
・アクヂュエーター駆動回!:5 、。 以  上 戎國各差イ言礪5嘘=ど圧S [ynv〕ディンGユ〔
声へり
Fig. 1 is a schematic diagram of the surface ta measurement device of the present invention, Fig. 2 is a diagram showing the power spectrum of the error signal, Fig. 3 is a transfer characteristic diagram of the actuator, and Fig. 4 is a diagram of the vibration plate of the recording medium. The spectrum diagram, FIG. 5, is a schematic diagram of a conventional surface *bleak measuring device. 1...Light source, 2...Reflection mirror, 3.5...Condensing lens, 4...Optical recording body, 6...Position sensor, 7...Recording medium 1. M stationary, 11... optical pickup, 12... focus error signal detection optical system, 1
3... Focus actuator! 4..., entertainment difference fM signal generation circuit, 15... phase compensation circuit, 16...
・Actuator drive times! :5,. Above is the difference between each country and the words 5 lies = pressure S [ynv] Din G Yu [
Voice over

Claims (1)

【特許請求の範囲】[Claims] 情報を光学式記録媒体に記録再生ずる光学ピックアップ
がフォーカスサーボを行っている時、前記光学ピックア
ップからフォーカス誤差信号を取出し、前記誤差信号S
にサーボ回路系のゲインG_1、フォーカスアクチュエ
ーターのゲインG_2を乗ずることにより面振れ量δ=
SG_1G_2を測定することを特徴とする面振れ測定
装置
When an optical pickup that records and reproduces information on an optical recording medium performs focus servo, a focus error signal is extracted from the optical pickup and the error signal S is
By multiplying by the gain G_1 of the servo circuit system and the gain G_2 of the focus actuator, the surface runout amount δ=
Surface runout measuring device characterized by measuring SG_1G_2
JP24463886A 1986-10-15 1986-10-15 Surface undulation measuring instrument Pending JPS6398843A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24463886A JPS6398843A (en) 1986-10-15 1986-10-15 Surface undulation measuring instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24463886A JPS6398843A (en) 1986-10-15 1986-10-15 Surface undulation measuring instrument

Publications (1)

Publication Number Publication Date
JPS6398843A true JPS6398843A (en) 1988-04-30

Family

ID=17121729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24463886A Pending JPS6398843A (en) 1986-10-15 1986-10-15 Surface undulation measuring instrument

Country Status (1)

Country Link
JP (1) JPS6398843A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02227816A (en) * 1989-02-28 1990-09-11 Fuji Photo Film Co Ltd Magnetic recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02227816A (en) * 1989-02-28 1990-09-11 Fuji Photo Film Co Ltd Magnetic recording medium

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