JPS6398665U - - Google Patents

Info

Publication number

JPS6398665U

JPS6398665U JP19418186U JP19418186U JPS6398665U JP S6398665 U JPS6398665 U JP S6398665U JP 19418186 U JP19418186 U JP 19418186U JP 19418186 U JP19418186 U JP 19418186U JP S6398665 U JPS6398665 U JP S6398665U

Authority

JP

Japan

Prior art keywords

silicon substrate

diaphragm

measurement pressure

pressure sensor

oxide film

Prior art date

1986-12-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000000758 substrate Substances 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• 238000005259 measurement Methods 0.000 claims 2
• 239000012535 impurity Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000000034 method Methods 0.000 description 3