JPS6398629U - - Google Patents

Info

Publication number

JPS6398629U

JPS6398629U JP19500386U JP19500386U JPS6398629U JP S6398629 U JPS6398629 U JP S6398629U JP 19500386 U JP19500386 U JP 19500386U JP 19500386 U JP19500386 U JP 19500386U JP S6398629 U JPS6398629 U JP S6398629U

Authority

JP

Japan

Prior art keywords

semiconductor wafer

container

coating

discharge pipe

back surface

Prior art date

1986-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 6
• 238000004140 cleaning Methods 0.000 claims description 3
• 239000011248 coating agent Substances 0.000 claims 5
• 238000000576 coating method Methods 0.000 claims 5
• 239000007788 liquid Substances 0.000 claims 3
• 238000007599 discharging Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 238000004528 spin coating Methods 0.000 description 1