JPS6398366U - - Google Patents
Info
- Publication number
- JPS6398366U JPS6398366U JP19467386U JP19467386U JPS6398366U JP S6398366 U JPS6398366 U JP S6398366U JP 19467386 U JP19467386 U JP 19467386U JP 19467386 U JP19467386 U JP 19467386U JP S6398366 U JPS6398366 U JP S6398366U
- Authority
- JP
- Japan
- Prior art keywords
- targets
- sputtering
- sample
- utility
- registration request
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19467386U JPS6398366U (enExample) | 1986-12-16 | 1986-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19467386U JPS6398366U (enExample) | 1986-12-16 | 1986-12-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6398366U true JPS6398366U (enExample) | 1988-06-25 |
Family
ID=31151858
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19467386U Pending JPS6398366U (enExample) | 1986-12-16 | 1986-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6398366U (enExample) |
-
1986
- 1986-12-16 JP JP19467386U patent/JPS6398366U/ja active Pending