JPS6398366U - - Google Patents

Info

Publication number
JPS6398366U
JPS6398366U JP19467386U JP19467386U JPS6398366U JP S6398366 U JPS6398366 U JP S6398366U JP 19467386 U JP19467386 U JP 19467386U JP 19467386 U JP19467386 U JP 19467386U JP S6398366 U JPS6398366 U JP S6398366U
Authority
JP
Japan
Prior art keywords
targets
sputtering
sample
utility
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19467386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19467386U priority Critical patent/JPS6398366U/ja
Publication of JPS6398366U publication Critical patent/JPS6398366U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP19467386U 1986-12-16 1986-12-16 Pending JPS6398366U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19467386U JPS6398366U (enrdf_load_stackoverflow) 1986-12-16 1986-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19467386U JPS6398366U (enrdf_load_stackoverflow) 1986-12-16 1986-12-16

Publications (1)

Publication Number Publication Date
JPS6398366U true JPS6398366U (enrdf_load_stackoverflow) 1988-06-25

Family

ID=31151858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19467386U Pending JPS6398366U (enrdf_load_stackoverflow) 1986-12-16 1986-12-16

Country Status (1)

Country Link
JP (1) JPS6398366U (enrdf_load_stackoverflow)

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