JPS6397233U - - Google Patents
Info
- Publication number
- JPS6397233U JPS6397233U JP19246186U JP19246186U JPS6397233U JP S6397233 U JPS6397233 U JP S6397233U JP 19246186 U JP19246186 U JP 19246186U JP 19246186 U JP19246186 U JP 19246186U JP S6397233 U JPS6397233 U JP S6397233U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- disk
- speed reduction
- reduction device
- rotates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims 2
- 239000007943 implant Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19246186U JPS6397233U (en, 2012) | 1986-12-15 | 1986-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19246186U JPS6397233U (en, 2012) | 1986-12-15 | 1986-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6397233U true JPS6397233U (en, 2012) | 1988-06-23 |
Family
ID=31147562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19246186U Pending JPS6397233U (en, 2012) | 1986-12-15 | 1986-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397233U (en, 2012) |
-
1986
- 1986-12-15 JP JP19246186U patent/JPS6397233U/ja active Pending