JPS6396482U - - Google Patents

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Publication number
JPS6396482U
JPS6396482U JP19122086U JP19122086U JPS6396482U JP S6396482 U JPS6396482 U JP S6396482U JP 19122086 U JP19122086 U JP 19122086U JP 19122086 U JP19122086 U JP 19122086U JP S6396482 U JPS6396482 U JP S6396482U
Authority
JP
Japan
Prior art keywords
detector
control device
valve
pressure
reducing valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19122086U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19122086U priority Critical patent/JPS6396482U/ja
Publication of JPS6396482U publication Critical patent/JPS6396482U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本考案の検出器用高精度ガス圧制御装
置の一実施例を説明するための図、第2図は2次
側圧力変化に対する検出器出力変化を示す図、第
3図は本考案による検出器用高精度ガス圧制御装
置の2次側圧力変化に対するヒステリシス特性を
示す図、第4図は従来のガスフロー型プロポーシ
ヨナルカウンターを示す図である。 1……ガスボンベ、2……圧力計、3……減圧
弁、4……圧力計、5……ニードルバルブ、6…
…フローメーター、7……高性能減圧弁、8……
圧力計、9……ガスフロー型検出器、10……背
圧弁。
Fig. 1 is a diagram for explaining an embodiment of the high-precision gas pressure control device for a detector according to the present invention, Fig. 2 is a diagram showing changes in detector output in response to changes in secondary side pressure, and Fig. 3 is a diagram for explaining an embodiment of the high-precision gas pressure control device for a detector according to the present invention. FIG. 4 is a diagram showing a hysteresis characteristic of a high-precision gas pressure control device for a detector with respect to a change in pressure on the secondary side of the detector, and FIG. 4 is a diagram showing a conventional gas flow type proportional counter. 1... Gas cylinder, 2... Pressure gauge, 3... Pressure reducing valve, 4... Pressure gauge, 5... Needle valve, 6...
...Flow meter, 7...High performance pressure reducing valve, 8...
Pressure gauge, 9...Gas flow type detector, 10...Back pressure valve.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 検出器等の微加圧域の入力側に2段の減圧弁を
、出力側に背圧弁を設けたことを特徴とする検出
器用高精度ガス圧制御装置。
A high-precision gas pressure control device for a detector, characterized in that a two-stage pressure reducing valve is provided on the input side of a slightly pressurized region of the detector, etc., and a back pressure valve is provided on the output side.
JP19122086U 1986-12-12 1986-12-12 Pending JPS6396482U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19122086U JPS6396482U (en) 1986-12-12 1986-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19122086U JPS6396482U (en) 1986-12-12 1986-12-12

Publications (1)

Publication Number Publication Date
JPS6396482U true JPS6396482U (en) 1988-06-22

Family

ID=31145160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19122086U Pending JPS6396482U (en) 1986-12-12 1986-12-12

Country Status (1)

Country Link
JP (1) JPS6396482U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56105512A (en) * 1980-01-28 1981-08-22 Toshiba Corp Automatic gaseous pressure control device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56105512A (en) * 1980-01-28 1981-08-22 Toshiba Corp Automatic gaseous pressure control device

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