JPS6396459U - - Google Patents

Info

Publication number
JPS6396459U
JPS6396459U JP19150386U JP19150386U JPS6396459U JP S6396459 U JPS6396459 U JP S6396459U JP 19150386 U JP19150386 U JP 19150386U JP 19150386 U JP19150386 U JP 19150386U JP S6396459 U JPS6396459 U JP S6396459U
Authority
JP
Japan
Prior art keywords
flow rate
adjustment mechanism
mode
switching
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19150386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438285Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19150386U priority Critical patent/JPH0438285Y2/ja
Publication of JPS6396459U publication Critical patent/JPS6396459U/ja
Application granted granted Critical
Publication of JPH0438285Y2 publication Critical patent/JPH0438285Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP19150386U 1986-12-12 1986-12-12 Expired JPH0438285Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19150386U JPH0438285Y2 (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19150386U JPH0438285Y2 (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Publications (2)

Publication Number Publication Date
JPS6396459U true JPS6396459U (enrdf_load_stackoverflow) 1988-06-22
JPH0438285Y2 JPH0438285Y2 (enrdf_load_stackoverflow) 1992-09-08

Family

ID=31145707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19150386U Expired JPH0438285Y2 (enrdf_load_stackoverflow) 1986-12-12 1986-12-12

Country Status (1)

Country Link
JP (1) JPH0438285Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0438285Y2 (enrdf_load_stackoverflow) 1992-09-08

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