JPS6396459U - - Google Patents

Info

Publication number
JPS6396459U
JPS6396459U JP19150386U JP19150386U JPS6396459U JP S6396459 U JPS6396459 U JP S6396459U JP 19150386 U JP19150386 U JP 19150386U JP 19150386 U JP19150386 U JP 19150386U JP S6396459 U JPS6396459 U JP S6396459U
Authority
JP
Japan
Prior art keywords
flow rate
adjustment mechanism
mode
switching
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19150386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438285Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19150386U priority Critical patent/JPH0438285Y2/ja
Publication of JPS6396459U publication Critical patent/JPS6396459U/ja
Application granted granted Critical
Publication of JPH0438285Y2 publication Critical patent/JPH0438285Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP19150386U 1986-12-12 1986-12-12 Expired JPH0438285Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19150386U JPH0438285Y2 (OSRAM) 1986-12-12 1986-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19150386U JPH0438285Y2 (OSRAM) 1986-12-12 1986-12-12

Publications (2)

Publication Number Publication Date
JPS6396459U true JPS6396459U (OSRAM) 1988-06-22
JPH0438285Y2 JPH0438285Y2 (OSRAM) 1992-09-08

Family

ID=31145707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19150386U Expired JPH0438285Y2 (OSRAM) 1986-12-12 1986-12-12

Country Status (1)

Country Link
JP (1) JPH0438285Y2 (OSRAM)

Also Published As

Publication number Publication date
JPH0438285Y2 (OSRAM) 1992-09-08

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