JPS6396386A - Connecting flange - Google Patents
Connecting flangeInfo
- Publication number
- JPS6396386A JPS6396386A JP61242487A JP24248786A JPS6396386A JP S6396386 A JPS6396386 A JP S6396386A JP 61242487 A JP61242487 A JP 61242487A JP 24248786 A JP24248786 A JP 24248786A JP S6396386 A JPS6396386 A JP S6396386A
- Authority
- JP
- Japan
- Prior art keywords
- flange
- bolt
- holes
- gate valve
- recess
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Flanged Joints, Insulating Joints, And Other Joints (AREA)
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
産業上の利用分野
本発明は超高真空機器の接続フランジに関するもので、
特にゲート弁等へ応用される。[Detailed Description of the Invention] Industrial Application Field The present invention relates to a connecting flange for ultra-high vacuum equipment.
Especially applied to gate valves, etc.
従来の技術
従来分子線エピタキシャル成長装置のような超高真空機
器のロードロック機構に用いられるゲート弁の接続フラ
ンジ部は、ゲート弁の両方のシール面のフランジにネジ
穴を有し、接続する２つの真空室に枝管を介して設けら
れた継ぎ手フランジのボルト穴からボルトトを通してゲ
ート弁側の７ランジに固定する構造を程している。第４
図を用いて説明する。第４図は、ゲート弁３を介して２
つの真空室である予備室２と成長室１とを接続した様子
を示す側面図である。この場合、接続する２つの真空室
ともゲート弁３のフランジ部９にネジ穴１０を有し、成
長室１側の接続フランジ６および予備室２側の接続フラ
ンジ７をボルト８によって固定する構造を程している。2. Description of the Related Art Conventionally, the connection flange portion of a gate valve used in the load lock mechanism of ultra-high vacuum equipment such as molecular beam epitaxial growth equipment has screw holes in the flanges on both sealing surfaces of the gate valve. The structure is such that the bolt is passed through the bolt hole of the joint flange provided in the vacuum chamber via a branch pipe and fixed to the 7 flange on the gate valve side. Fourth
This will be explained using figures. FIG. 4 shows 2 through gate valve 3.
FIG. 2 is a side view showing how the preliminary chamber 2 and the growth chamber 1, which are two vacuum chambers, are connected. In this case, the two vacuum chambers to be connected have a screw hole 10 in the flange portion 9 of the gate valve 3, and the connecting flange 6 on the growth chamber 1 side and the connecting flange 7 on the preliminary chamber 2 side are fixed with bolts 8. I'm in the middle of it.
発明が解決しようとする問題点
しかし、以上のような構成では、ボルト８を挿入する為
に、フランジ６と成長室１の壁１１の間に少なくともボ
ルト８の長さの間隔りを有する枝管４を必要とする。こ
れは、フランジ６と成長室１とを結ぶ枝管４の体積分だ
け成長室１の容積が増大し、排気効率が低下すること、
ロードロックの搬送距離が長くなり、より精度と強度の
高い搬送機構を必要とすること等多くの間頂を有する。Problems to be Solved by the Invention However, in the above configuration, in order to insert the bolt 8, a branch pipe having a distance of at least the length of the bolt 8 between the flange 6 and the wall 11 of the growth chamber 1 is required. Requires 4. This is because the volume of the growth chamber 1 increases by the volume of the branch pipe 4 connecting the flange 6 and the growth chamber 1, and the exhaust efficiency decreases.
The transport distance of the load lock becomes longer, and there are many problems such as the need for a transport mechanism with higher precision and strength.
問題点を解決するだめの手段
本発明はほぼ平行で同寸法の２つのシール面を有し、め
ネジを切られたタッグ穴と、ボルト通し穴とを交互に有
し、上記ボルト通し穴が凹部を有する接続フランジを提
供するものである。Means for Solving the Problem The present invention has two sealing surfaces that are substantially parallel and of the same size, and has alternating internally threaded tag holes and bolt through holes, the bolt through holes being A connecting flange having a recess is provided.
作用
本発明の接続フランジ構造は、上記凹部を有するボルト
通し穴の凹部のある側からボルトｔ−挿入し、真空室側
のフランジにタップ穴を設けておいて固定する。この時
、上記凹部の大きさを上記ボルトの頭部より大きくする
ことにより、ボルトで本接続フランジと、真空室側のフ
ランジを固定した状態でも、上記ボルトを挿入した側の
７ランジ面には突起が生じない。そこで、もう一方の真
空室側には従来と全く同様の枝管を介した接続フランジ
を設け、本接続フランジのタップ穴を用いて、ボルトに
より固定する。このような接続フランジ構造を採用すれ
ば、一方の真空室側のフランジは、真空室との間を枝管
を介することなく、真空室に直接７ランジを取り付ける
ことが可能であるため、枝管の余分な容積を除去できる
。また、ロードロック機構等に応用すれば、搬送系の長
さを枝管の長さ分だけ短かくすることができる。Function: In the connection flange structure of the present invention, a bolt is inserted from the side where the recess is in the bolt through hole having the recess, and a tap hole is provided in the flange on the vacuum chamber side to fix the bolt. At this time, by making the size of the recess larger than the head of the bolt, even when the main connection flange and the flange on the vacuum chamber side are fixed with the bolt, the 7 flange surface on the side where the bolt is inserted is No protrusions occur. Therefore, on the other side of the vacuum chamber, a connection flange is provided via a branch pipe, which is exactly the same as in the conventional case, and the connection flange is fixed with bolts using the tapped holes of the main connection flange. If such a connection flange structure is adopted, the flange on one side of the vacuum chamber can connect the 7 langes directly to the vacuum chamber without passing a branch pipe between the vacuum chamber and the branch pipe. can eliminate excess volume. Furthermore, if applied to a load lock mechanism or the like, the length of the conveyance system can be shortened by the length of the branch pipe.
実施例
本発明の一実施例として、ゲート弁へ応用した例につい
て第１〜第３図を参照して説明する。まず第１図は本実
施例の接続７ランジの取り付けられた様子を示す側断面
図であって、３がゲート弁本体、１２が凹部、１４がボ
ルト通し穴、１３がタップ穴、８がボルトである。また
第２図、第３図は接続面及び第２図内の直線ＡＢ、ＣＤ
で切断したときの断面図である。タップ穴１３は第１図
の７ランジ７と接続するときに、また、ボルト通し穴１
４はフランジ６と接続するときに用いる。Embodiment As an embodiment of the present invention, an example in which the present invention is applied to a gate valve will be described with reference to FIGS. 1 to 3. First, FIG. 1 is a side sectional view showing how the connection 7 flange of this embodiment is attached, in which 3 is the gate valve body, 12 is a recess, 14 is a bolt through hole, 13 is a tapped hole, and 8 is a bolt. It is. Also, Figures 2 and 3 show the connection plane and the straight lines AB and CD in Figure 2.
FIG. The tapped hole 13 is also used when connecting to the 7 flange 7 in Fig. 1.
4 is used when connecting with the flange 6.
凹部１２はボルトの挿入、ネジ締めが行ないやすいよう
に外側を開けである。また、均一に締まるようにボルト
通し穴１４、タップ穴１３は交互に１６ケ所設けである
。取付は第１図のように、フランジ７に対してはゲート
弁３にネジが切っであるのでボルト８により固定し、７
ランジεに対してはフランジｅ側にネジが切っであるの
でボルト８′により固定する。使用しているボルトは六
角レンチ用で、凹部１２の開口部はレンチが回る大きさ
で決定しである。図には示していないが、フランジ接合
部はコンフラツト構造で、金属ガスケットを用いて真空
にしている。同様に接合７ランジ数が増えても凹部１２
を増やすことで接続できる。The recess 12 is open on the outside to facilitate bolt insertion and screw tightening. In addition, 16 bolt holes 14 and tap holes 13 are provided alternately to ensure uniform tightening. For installation, as shown in Figure 1, the gate valve 3 is threaded to the flange 7, so fix it with bolts 8, and
Since the flange ε is threaded on the flange e side, it is fixed with bolts 8'. The bolt used is for a hexagonal wrench, and the opening of the recess 12 is determined by the size that the wrench can turn. Although not shown in the figure, the flange joint has a flat structure and is evacuated using a metal gasket. Similarly, even if the number of joint 7 langes increases, the recess 12
You can connect by increasing .
まだ、タップ穴１３と通し穴１４とは交互に設けられて
いるので、２つの真空室の接続用フランジの角度がずれ
る。この対策として、あらかじめフランジの真空室に対
する取付角をずらせておくか、枝管を有する側のフラン
ジを回転フランジにすることで、角度の補正を行うこと
ができる。Still, since the tapped holes 13 and the through holes 14 are provided alternately, the angles of the connecting flanges of the two vacuum chambers are shifted. As a countermeasure for this, the angle can be corrected by shifting the mounting angle of the flange with respect to the vacuum chamber in advance, or by making the flange on the side having the branch pipe a rotating flange.
発明の効果
以上のように本発明によれば、ロードロック機構のよう
に、位置精度をよくするためにアーム移動距離を短かく
できる。また、イオン、電子等のビーム輸送系で残留ガ
ス等との散乱による強度の減少を防ぐ為に輸送距離を短
かくできる。このように真空装置間の距離をつめる場合
に有効である。Effects of the Invention As described above, according to the present invention, the arm movement distance can be shortened in order to improve positional accuracy like a load lock mechanism. Furthermore, in order to prevent a decrease in intensity due to scattering with residual gas in a beam transport system for ions, electrons, etc., the transport distance can be shortened. This is effective in reducing the distance between vacuum devices.
さらに、真空室との間の枝管が不要になるので、真空容
積を減少できる。かつ、ポンプ系との接続部に用いれば
、コンダクタンスの損失を減少できる。Furthermore, since there is no need for a branch pipe between the vacuum chamber and the vacuum chamber, the vacuum volume can be reduced. In addition, conductance loss can be reduced by using it at the connection part with the pump system.
第１図は本発明の一実施例における接続フランジをゲー
ト弁として用いた場合の断面図、第２図は同ゲート弁を
接続面側から見た断面図、第３図は第２図において直線
人Ｂ及びＣＤで切断したときのゲート弁の断面図、第４
図は従来の方法でゲート弁を取付だときの状態を示す断
面図である。
１・・・・・・成長室、２・・・・・・予備室、３・・
・・・・ゲート弁、４・・・・・・枝管（成長室側）、
６・・・・・・枝管（予備室側）、６・・・・・・成長
室側フランジ、７・・・・・・予備室側７ランジ、８・
・・・・・ボルト、９・・・・・・ゲート弁フランジ、
１０・・・・・・ネジ穴、１１・・・・・・壁、１２・
・・・・・凹部、１３・・・・・・ボルト用タップ穴、
１４・・・・・・ボルト通し穴。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名ｊ−
−一或畏ｔ
５−ＩＷ
６”、７−７シソジ
１４−一一不′ｌしＹ硝「し１二
ｆ−・−底蚤窒
Ｃ２７−−フランジFig. 1 is a sectional view of a connecting flange according to an embodiment of the present invention when used as a gate valve, Fig. 2 is a sectional view of the same gate valve as seen from the connecting surface side, and Fig. 3 is a straight line in Fig. 2. Cross-sectional view of the gate valve when cut by person B and CD, 4th
The figure is a sectional view showing a state in which a gate valve is installed using a conventional method. 1...Growth room, 2...Preliminary room, 3...
...Gate valve, 4...Branch pipe (growth chamber side),
6... Branch pipe (preparatory chamber side), 6... Growth chamber side flange, 7... Preparatory chamber side 7 lange, 8...
...Bolt, 9...Gate valve flange,
10...Screw hole, 11...Wall, 12.
...Recess, 13...Tapped hole for bolt,
14...Bolt through hole. Name of agent: Patent attorney Toshio Nakao and one other person
-1 5-IW 6'', 7-7 14-11 Y glass 12 f--bottom C27--Flange
Claims (2)
ジを切られたタップ穴と、ボルト通し穴とを交互に有し
、上記ボルト通し穴が凹部を有するようにした接続フラ
ンジ。(1) A connection flange that has two sealing surfaces that are substantially parallel and of the same size, and that has female threaded tapped holes and bolt through holes alternately, and the bolt through holes have recesses. .
い特許請求の範囲第１項に記載の接続フランジ。(2) The connection flange according to claim 1, wherein the recess is larger than the head of the bolt passing through the bolt passage hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61242487A JPS6396386A (en) | 1986-10-13 | 1986-10-13 | Connecting flange |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61242487A JPS6396386A (en) | 1986-10-13 | 1986-10-13 | Connecting flange |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6396386A true JPS6396386A (en) | 1988-04-27 |
Family
ID=17089814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61242487A Pending JPS6396386A (en) | 1986-10-13 | 1986-10-13 | Connecting flange |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6396386A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007162942A (en) * | 2005-12-09 | 2007-06-28 | Nexans | Line pipe used for transportation of frozen medium |
-
1986
- 1986-10-13 JP JP61242487A patent/JPS6396386A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007162942A (en) * | 2005-12-09 | 2007-06-28 | Nexans | Line pipe used for transportation of frozen medium |
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