JPS6395254U - - Google Patents

Info

Publication number

JPS6395254U

JPS6395254U JP19008286U JP19008286U JPS6395254U JP S6395254 U JPS6395254 U JP S6395254U JP 19008286 U JP19008286 U JP 19008286U JP 19008286 U JP19008286 U JP 19008286U JP S6395254 U JPS6395254 U JP S6395254U

Authority

JP

Japan

Prior art keywords

substrate

semiconductor device

diffusion layer

dielectric

island

Prior art date

1986-12-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

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• 239000000758 substrate Substances 0.000 claims description 5
• 239000004065 semiconductor Substances 0.000 claims description 4
• 229910004298 SiO 2 Inorganic materials 0.000 claims description 2
• 238000009792 diffusion process Methods 0.000 claims 2
• 239000004020 conductor Substances 0.000 claims 1
• 238000002955 isolation Methods 0.000 claims 1
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 1
• 229920005591 polysilicon Polymers 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 230000015572 biosynthetic process Effects 0.000 description 1
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1