JPS6395242U - - Google Patents

Info

Publication number
JPS6395242U
JPS6395242U JP19008186U JP19008186U JPS6395242U JP S6395242 U JPS6395242 U JP S6395242U JP 19008186 U JP19008186 U JP 19008186U JP 19008186 U JP19008186 U JP 19008186U JP S6395242 U JPS6395242 U JP S6395242U
Authority
JP
Japan
Prior art keywords
wafer
carrier
guide member
attached
guide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19008186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19008186U priority Critical patent/JPS6395242U/ja
Publication of JPS6395242U publication Critical patent/JPS6395242U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP19008186U 1986-12-10 1986-12-10 Pending JPS6395242U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19008186U JPS6395242U (US07655688-20100202-C00086.png) 1986-12-10 1986-12-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19008186U JPS6395242U (US07655688-20100202-C00086.png) 1986-12-10 1986-12-10

Publications (1)

Publication Number Publication Date
JPS6395242U true JPS6395242U (US07655688-20100202-C00086.png) 1988-06-20

Family

ID=31142967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19008186U Pending JPS6395242U (US07655688-20100202-C00086.png) 1986-12-10 1986-12-10

Country Status (1)

Country Link
JP (1) JPS6395242U (US07655688-20100202-C00086.png)

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