JPS6394657U - - Google Patents

Info

Publication number
JPS6394657U
JPS6394657U JP1986189323U JP18932386U JPS6394657U JP S6394657 U JPS6394657 U JP S6394657U JP 1986189323 U JP1986189323 U JP 1986189323U JP 18932386 U JP18932386 U JP 18932386U JP S6394657 U JPS6394657 U JP S6394657U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
polishing plate
polishing
coming
attaching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986189323U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986189323U priority Critical patent/JPS6394657U/ja
Publication of JPS6394657U publication Critical patent/JPS6394657U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP1986189323U 1986-12-09 1986-12-09 Pending JPS6394657U (US07179912-20070220-C00144.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986189323U JPS6394657U (US07179912-20070220-C00144.png) 1986-12-09 1986-12-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986189323U JPS6394657U (US07179912-20070220-C00144.png) 1986-12-09 1986-12-09

Publications (1)

Publication Number Publication Date
JPS6394657U true JPS6394657U (US07179912-20070220-C00144.png) 1988-06-18

Family

ID=31141515

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986189323U Pending JPS6394657U (US07179912-20070220-C00144.png) 1986-12-09 1986-12-09

Country Status (1)

Country Link
JP (1) JPS6394657U (US07179912-20070220-C00144.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101032A (ja) * 1985-10-28 1987-05-11 Nec Corp 半導体ウエハ−ス加工治具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101032A (ja) * 1985-10-28 1987-05-11 Nec Corp 半導体ウエハ−ス加工治具

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