JPS6393635U - - Google Patents
Info
- Publication number
- JPS6393635U JPS6393635U JP19038686U JP19038686U JPS6393635U JP S6393635 U JPS6393635 U JP S6393635U JP 19038686 U JP19038686 U JP 19038686U JP 19038686 U JP19038686 U JP 19038686U JP S6393635 U JPS6393635 U JP S6393635U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- substrate processing
- processing tank
- drain
- side opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19038686U JPS6393635U (enExample) | 1986-12-09 | 1986-12-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19038686U JPS6393635U (enExample) | 1986-12-09 | 1986-12-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6393635U true JPS6393635U (enExample) | 1988-06-17 |
Family
ID=31143557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19038686U Pending JPS6393635U (enExample) | 1986-12-09 | 1986-12-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6393635U (enExample) |
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1986
- 1986-12-09 JP JP19038686U patent/JPS6393635U/ja active Pending