JPS6393633U - - Google Patents

Info

Publication number
JPS6393633U
JPS6393633U JP18755186U JP18755186U JPS6393633U JP S6393633 U JPS6393633 U JP S6393633U JP 18755186 U JP18755186 U JP 18755186U JP 18755186 U JP18755186 U JP 18755186U JP S6393633 U JPS6393633 U JP S6393633U
Authority
JP
Japan
Prior art keywords
substrate processing
valve
pressure valve
drain port
type substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18755186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18755186U priority Critical patent/JPS6393633U/ja
Publication of JPS6393633U publication Critical patent/JPS6393633U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)
JP18755186U 1986-12-04 1986-12-04 Pending JPS6393633U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18755186U JPS6393633U (enExample) 1986-12-04 1986-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18755186U JPS6393633U (enExample) 1986-12-04 1986-12-04

Publications (1)

Publication Number Publication Date
JPS6393633U true JPS6393633U (enExample) 1988-06-17

Family

ID=31138115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18755186U Pending JPS6393633U (enExample) 1986-12-04 1986-12-04

Country Status (1)

Country Link
JP (1) JPS6393633U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220434A (ja) * 1985-03-27 1986-09-30 Toshiba Corp ウエハ洗浄装置
JPS6146731B2 (enExample) * 1982-06-11 1986-10-15 Matsushita Denki Sangyo Kk

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146731B2 (enExample) * 1982-06-11 1986-10-15 Matsushita Denki Sangyo Kk
JPS61220434A (ja) * 1985-03-27 1986-09-30 Toshiba Corp ウエハ洗浄装置

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