JPS6393633U - - Google Patents
Info
- Publication number
- JPS6393633U JPS6393633U JP18755186U JP18755186U JPS6393633U JP S6393633 U JPS6393633 U JP S6393633U JP 18755186 U JP18755186 U JP 18755186U JP 18755186 U JP18755186 U JP 18755186U JP S6393633 U JPS6393633 U JP S6393633U
- Authority
- JP
- Japan
- Prior art keywords
- substrate processing
- valve
- pressure valve
- drain port
- type substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000007654 immersion Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18755186U JPS6393633U (de) | 1986-12-04 | 1986-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18755186U JPS6393633U (de) | 1986-12-04 | 1986-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6393633U true JPS6393633U (de) | 1988-06-17 |
Family
ID=31138115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18755186U Pending JPS6393633U (de) | 1986-12-04 | 1986-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6393633U (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61220434A (ja) * | 1985-03-27 | 1986-09-30 | Toshiba Corp | ウエハ洗浄装置 |
| JPS6146731B2 (de) * | 1982-06-11 | 1986-10-15 | Matsushita Denki Sangyo Kk |
-
1986
- 1986-12-04 JP JP18755186U patent/JPS6393633U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6146731B2 (de) * | 1982-06-11 | 1986-10-15 | Matsushita Denki Sangyo Kk | |
| JPS61220434A (ja) * | 1985-03-27 | 1986-09-30 | Toshiba Corp | ウエハ洗浄装置 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW371639B (en) | Razor handle assembly | |
| JPS6393633U (de) | ||
| JPS56100433A (en) | Manufacture of semiconductor device | |
| JPS6180562U (de) | ||
| JPS63101653U (de) | ||
| FR2424814A1 (fr) | Procede pour realiser une liaison d'une certaine etendue entre deux surfaces | |
| JPH0199776U (de) | ||
| JPS62136306U (de) | ||
| JPH0410053Y2 (de) | ||
| JPH01152132U (de) | ||
| JPH0647893Y2 (ja) | 荷物係合手段を有する走行装置の駆動機構 | |
| JPS62181769U (de) | ||
| JPS63180927U (de) | ||
| JPS61142971U (en) | A chiyatsu key valve | |
| JPH0450552U (de) | ||
| JPH0367631U (de) | ||
| JPS61112844U (de) | ||
| JPS61146588U (de) | ||
| JPS6430393U (de) | ||
| JPS6362870U (de) | ||
| JPS635371U (de) | ||
| JPH0373758U (de) | ||
| JPH0316880U (de) | ||
| JPH0317633U (de) | ||
| JPS6282670U (de) |