JPS6392915U - - Google Patents

Info

Publication number
JPS6392915U
JPS6392915U JP18677386U JP18677386U JPS6392915U JP S6392915 U JPS6392915 U JP S6392915U JP 18677386 U JP18677386 U JP 18677386U JP 18677386 U JP18677386 U JP 18677386U JP S6392915 U JPS6392915 U JP S6392915U
Authority
JP
Japan
Prior art keywords
chamber
gas
sealed
regulating valve
pressure regulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18677386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18677386U priority Critical patent/JPS6392915U/ja
Publication of JPS6392915U publication Critical patent/JPS6392915U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Control Of Fluid Pressure (AREA)
JP18677386U 1986-12-05 1986-12-05 Pending JPS6392915U (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18677386U JPS6392915U (nl) 1986-12-05 1986-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18677386U JPS6392915U (nl) 1986-12-05 1986-12-05

Publications (1)

Publication Number Publication Date
JPS6392915U true JPS6392915U (nl) 1988-06-15

Family

ID=31136636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18677386U Pending JPS6392915U (nl) 1986-12-05 1986-12-05

Country Status (1)

Country Link
JP (1) JPS6392915U (nl)

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