JPS6392225A - Dc electric source for pvd apparatus - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a DC power supply device for a PVD device, which is used as a bias power source in a PVD device.

[Conventional technology]

As shown in Fig. 2, a conventional DC power supply device for a PVD device has a three-phase AC power supply, a circuit breaker 1, and a contact point 2 of a magnetic contactor.
The primary side of the voltage regulator 3 consisting of a sliding type autotransformer is connected through the voltage regulator 3 in series, and the delta-
The primary side of a delta-connected three-phase rectifier transformer 4 is connected, and the AC end of a three-phase controlled rectifier 5 consisting of a three-phase mixed bridge rectifier is connected to the secondary side of the three-phase rectifier transformer 4. A crowbar switch 7 consisting of a dummy resistor 6 and a thyristor is connected in parallel between the positive and negative DC ends of the three-phase control rectifier 5, and one end (anode side) of the crowbar switch 7 is connected to the vacuum vessel 8a of the PVD device 8. Connect the other end (cathode side) of the crowbar switch 7 to the blocking diode 9
It is connected to the substrate 8b of the PVD equipment W8 via. In this case, the three-phase vI control rectifier 5 has a configuration like No. 31yJ.

This DC power supply device for PVD equipment transforms the voltage of a three-phase AC power supply with a voltage regulator 3 and then applies it to a three-phase control rectifier 5 via a three-phase rectifier transformer 4 to perform three-phase full-wave rectification. The obtained DC voltage is applied to the PVD device 8 as a bias voltage. Note that the dummy resistor 6 is
This is for passing a holding current through the sirisk of the three-phase controlled rectifier 5.

When an overcurrent flows through the PVD device 8, the crowbar switch 7 is turned on to divert the current flowing through the PVD devices W and 8 to the crowbar switch 7, thereby protecting the PVD device 8. It has become.

Further, in order to protect the crowbar switch 7, the crowbar switch 7 is cut off by detecting that current flows through the crowbar switch 7 and stopping the triggering of the thyristor of the three-phase control rectifier 5. There is. 10
A current limiting resistor is used to suppress overcurrent or crowbar current flowing through the PVD device 8, and is usually about 1Ω or less.

Note that after this, the bias voltage is applied to the PVD device 8 again by triggering the sirisk of the three-phase controlled rectifier 5 again.

This DC power supply device for a PVD device is manufactured with, for example, the following specifications.

AC input voltage? AC3φ3W 200V, 50 or 60Hz DC output voltage jDc-50V to -1300V DC output current: 80A [Problems to be solved by the invention] In such a conventional DC power supply device for a PVD device, the capacity of the voltage regulator 3 is There are problems in that it is large and expensive, and the loss of the dummy resistor 6 is large.

This point will be explained in detail below. Now, if the DC output current of a DC power supply for a PVD device is, for example, 80A, the current in the three-phase power supply line will be 315°28. Therefore, the voltage regulator 3 needs to be rated at 400 A, which makes it expensive.

In addition, the holding current IL of the three-phase control rectifier 5 is required to be 0.5A, and the holding current iL of 0.5A is converted to the DC output voltage E
Since the current must be passed through the dummy resistor 6 when the voltage is the lowest - 50V, the resistance value R of the dummy resistor 6 is 100V.
It becomes Ω. However, if the resistance value R of dummy resistor 6 is 100
When the DC output voltage E is set to the highest value of 11300V with the resistor set to Become.

An object of the present invention is to provide a DC power supply device for a PVD device that can lower the rating of a voltage regulator for DC output voltage adjustment, lower costs, and reduce loss of dummy resistors.

[Means for solving problems]

The DC power supply device for PVD equipment of the present invention includes a voltage regulator whose primary side is connected to a three-phase AC power supply, and a two-way voltage regulator of the voltage regulator.
a first three-phase rectifier transformer with a primary side connected to the next side;
a first three-phase controlled rectifier whose AC end is connected to the secondary side of the first three-phase rectifier transformer; and a second three-phase rectifier transformer whose primary side is connected to the three-phase AC power supply. and a second three-phase rectifier transformer having an AC end connected to the secondary side of the second three-phase rectifier transformer and a positive DC end connected to the negative DC end of the first three-phase controlled rectifier. a parallel circuit of a phase control rectifier, a first dummy resistor and a first crowbar switch connected between the positive and negative DC terminals of the first three-phase controlled rectifier, and the second three-phase rectifier; A parallel circuit of a second dummy resistor and a second crowbar switch connected between the positive and negative DC terminals of the control rectifier is provided.

[Effect]

According to the configuration of the present invention, independent first and second three-phase controlled rectifiers are provided, and the negative side DC end of the first three-phase controlled rectifier is connected to the positive side DC end of the second three-phase controlled rectifier. and a first dummy resistor and a first crowbar switch are connected between the positive side and negative side DC ends of the first three-phase controlled rectifier, and the positive side of the second three-phase controlled rectifier. Since the second dummy resistor and the second crowbar switch are connected between the negative DC terminal and the negative DC terminal, the voltage applied to the first and second dummy resistors can be lowered, and the voltage applied to the first and second dummy resistors can be lowered. The loss of the dummy resistor in step 2 can be reduced,
Furthermore, the capacity of the voltage regulator can be reduced, and costs can be reduced.

〔Example〕

An embodiment of the present invention will be described based on FIG. This DC power supply device for PVD equipment As shown in FIG. 1
3, the primary side of a delta-delta connection type three-phase rectifier transformer 14 is connected to the secondary side of the voltage regulator 13, and the secondary side of the three-phase rectifier transformer 14 is connected to the The AC end of a three-phase controlled rectifier 15 consisting of a three-phase mixed bridge rectifier is connected to the DC end of the three-phase controlled rectifier 15 on the positive side and the negative side, and a crowbar switch 17 consisting of a dummy resistor 16, a bypass diode 18, and a thyristor is connected between the positive and negative DC ends of the three-phase controlled rectifier 15. and a series circuit in which current limiting elements 19 are connected in series are connected in parallel.

In addition, the primary side of the three-phase rectifier transformer 22 of the delta-star connection type is connected to the three-phase AC power supply through the circuit breaker 11 and the contact 21 of the magnetic contactor in series, and the transformer for the Sanwa luxury The AC end of a three-phase controlled rectifier 23 consisting of a three-phase mixed bridge rectifier is connected to the secondary side of 22, and a dummy resistor 24, a bypass diode 26, and a thyristor are connected between the positive and negative DC ends of the three-phase controlled rectifier 23. A series circuit in which a current limiting element 27 is connected in series is connected in parallel to a crowbar switch 25 consisting of the following.

Then, the positive DC end of the three-phase controlled rectifier 23 is connected to the negative DC end of the three-phase controlled rectifier 15, and the positive DC end of the three-phase controlled rectifier 15 and the negative side of the three-phase controlled rectifier 23 are connected to the negative DC end of the three-phase controlled rectifier 15. Output terminals 30 and 31 are respectively provided at the DC ends of the PVD device 20, and the positive output terminal is connected to the vacuum vessel 20a of the PVD device 20.
The negative output terminal 31 is connected to the substrate 20b of the PVD device 20.

In this case, the three-phase controlled rectifiers 15, 23 have the configuration shown in FIG. 3, and do not perform phase control of the syrisk, but simply turn on and off.

Note that 28 is an inductor, 29 is a resistor, and these are the second
It replaces the blocking diode 9 in the figure, and P
A voltage is generated when the VD device 20 is discharged, and a voltage for igniting the crowbar switch 17.25 is supplied. The value of the inductor 28 is matched to the pulse width that triggers the crowbar switch 17.25.

This DC power supply device for PVD equipment transforms the voltage of a three-phase AC power supply with a voltage regulator 13, and then transforms the voltage of a three-phase AC power supply with a three-phase rectifier transformer 1.
4 to the three-phase controlled rectifier 15 to perform three-phase full-wave rectification, and also to the three-phase controlled rectifier 23 via the three-phase rectifier transformer 22 to perform three-phase full-wave rectification.

If both contacts 12 and 21 of the magnetic contactor are on, the sum of the variable DC voltage obtained from the three-phase controlled rectifier 15 and the fixed DC voltage obtained from the three-phase controlled rectifier 23 is applied to the PVD device 20. Applied as a bias voltage.

Further, if only the contact 12 of the electromagnetic contactor is on, a variable DC voltage is output only from the three-phase control rectifier 15, and this DC voltage is applied to the PVD device 20 via the bypass diode 26, and vice versa. If only the contacts 21 of the contactor are on, a fixed DC voltage is output only from the three-phase controlled rectifier, and this DC voltage is applied to the PVD device 20 via the bypass diode 18.

Therefore, by switching on/off the contacts 12.21 of the electromagnetic contactor and adjusting the voltage regulator 13, the two-phase controlled rectifier 15
The bias voltage applied to the PVD device 20 can be arbitrarily adjusted within the range from the lowest output DC voltage of the three-phase controlled rectifier 15 to the voltage obtained by adding the output DC voltage of the three-phase controlled rectifier 23 to the highest output DC voltage of the three-phase controlled rectifier 15.

Note that the dummy resistor 16.24 is connected to the three-phase controlled rectifier 15.
This is for supplying a holding current to the thyristor No. 23.

When an overcurrent flows through the PVD device 20, the crowbar switch 17.25 is turned on to divert the current flowing through the PVD device Wt20 to the crowbar switch 17.25, thereby protecting the PVD device 20. It is now being planned.

In addition, in order to protect the crowbar switch 17.25, the crowbar switch 17.degree. 25 is cut off.

Note that after this, the bias voltage will be applied to the PVD device 20 again by triggering the cyrisk of the three-phase controlled rectifier 15.23 again.

Furthermore, the ignition of the crowbar switch IT, 25 is controlled by the crowbar switch when either one of the three-phase control rectifiers 15 or 23 is operated independently, for example, when only the three-phase control rectifier 15 is operated. Only switch 17 is fired,
After this, only the sirisk of the three-phase controlled rectifier 15 is temporarily extinguished.

This DC power supply device for PVD equipment is manufactured, for example, with the following specifications.

AC input voltage: AC3φ3W 200V, 50 or 60Hz DC output voltage: DC -50V to -1300V DC output current: 80A At this time, the DC output voltage output from the three-phase control rectifier 15 is DC -50V to -650V, The DC voltage output from the three-phase controlled rectifier 23 is DC-650V.

The loss of the dummy resistor 16.degree. 24 and the rating of the voltage regulator 13 in this embodiment circuit will be explained.

Holding current IL of the thyristor of the three-phase controlled rectifier 15.23
Assuming that 0.5 A is the same as in the conventional example, the dummy resistor 16 needs to flow 0.5 A at -50■, so the resistance value R1 of the dummy resistor 16 is R+-5010, 5-100.
On the other hand, the resistance value R of the dummy resistor 16 is set to 100Ω.
Dummy resistor 16 when the maximum voltage is -650V
The loss P1 is P+=6502/100 -4.23KW.

In addition, since the dummy resistor 24 only needs to pass a current of 650Vt'0.5, its resistance value R2 is R2 - 650Vt'0.5.
Therefore, the loss P2 of the dummy resistor 24 is R2-650"/1300 -0.325KW, and the sum of the losses of the dummy resistor 16.24 is 4.56K.
W, which is approximately 174 times the loss P1 of the dummy resistor 6 in the conventional example.

Furthermore, the current rating of the voltage regulator 13 can be reduced to 1/2 compared to the conventional example, since it is sufficient that the three-phase control rectifier 15 can output a maximum of -650 V, which is half of that of the conventional example.

In addition, power is supplied to the three-phase controlled rectifier 15 from a three-phase rectifier transformer 14 of the delta-delta connection type, and the three-phase controlled rectifier 2
3 is a delta-star connected three-phase rectifier transformer 22
Since power is supplied from both three-phase rectifier transformers 14.2
The phases of the two secondary voltages will be shifted by 30 degrees from each other,
The voltage waveform between the output terminals 30 and 31 is a 12-phase current waveform, and a DC voltage with less ripple than in the conventional example is obtained.

It should be noted that an embodiment in which only both of the three-phase control rectifiers 15 and 23 are operated simultaneously can be given. In this case, the adjustment range of the output voltage becomes narrower, but the bypass diodes 18 and 26 become unnecessary. Moreover, if it is considered that the three-phase controlled rectifier 23 does not operate independently, the bypass diode 18 can be omitted.

【Effect of the invention〕

According to the DC power supply device for a PVD device of the present invention, independent first and second three-phase controlled rectifiers are provided, and the second three-phase controlled rectifier is connected to the negative side DC end of the first three-phase controlled rectifier. A first dummy resistor and a first crowbar switch are connected between the positive and negative DC ends of the first three-phase controlled rectifier, and a second three-phase Since the second dummy resistor and the second crowbar switch are connected between the positive and negative DC terminals of the control rectifier, the voltages applied to the first and second dummy resistors can be lowered. , the loss of the first and second dummy resistors can be reduced, the capacity of the voltage regulator can be reduced, and costs can be reduced.

[Brief explanation of the drawing]

FIG. 1 is a circuit diagram of an embodiment of the present invention, FIG. 2 is a circuit diagram of an example of a conventional DC power supply device for a PVD device, and FIG. 3 is a detailed circuit diagram of its essential parts. 13... Voltage regulator, 14.22... Three-phase rectifier transformer, 15.23... Three-phase controlled rectifier, 16.24
...Dummy resistor, 17.25...Crowbar switch, 18.26...Bypass diode, 20...P
VD device

Claims (3)

[Claims] (1) A voltage regulator whose primary side is connected to a three-phase AC power supply,
A first three-phase rectifier transformer whose primary side is connected to the secondary side of this voltage regulator, and two of this first three-phase rectifier transformer.
a first three-phase controlled rectifier whose AC end is connected to the next side; a second three-phase rectifier transformer whose primary side is connected to the three-phase AC power supply; and this second three-phase rectifier transformer. a second three-phase control rectifier having an AC end connected to the secondary side of the rectifier and a positive DC end connected to a negative DC end of the first three-phase control rectifier; A parallel circuit of a first dummy resistor and a first crowbar switch connected between the positive side and negative side DC ends of the rectifier, and connected between the positive side and negative side DC ends of the second three-phase controlled rectifier. a second dummy resistor and a parallel circuit of a second crowbar switch.
DC power supply for VD equipment. (2) A first bypass diode is additionally connected in parallel to the parallel circuit of the first dummy resistor and the first crowbar switch, and the second dummy resistor and the second crowbar switch are connected in parallel.
A DC power supply device for a PVD device according to claim 1, wherein a second bypass diode is additionally connected in parallel to the parallel circuit of the crowbar switch. (3) The DC power supply device for a PVD device according to claim (1), wherein first and second current limiting elements are inserted in series with the first and second crowbar switches, respectively.