JPS6391897U - - Google Patents
Info
- Publication number
- JPS6391897U JPS6391897U JP18639086U JP18639086U JPS6391897U JP S6391897 U JPS6391897 U JP S6391897U JP 18639086 U JP18639086 U JP 18639086U JP 18639086 U JP18639086 U JP 18639086U JP S6391897 U JPS6391897 U JP S6391897U
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- objective lens
- dew condensation
- cylinder
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005494 condensation Effects 0.000 claims description 4
- 238000009833 condensation Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18639086U JPS6391897U (OSRAM) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18639086U JPS6391897U (OSRAM) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6391897U true JPS6391897U (OSRAM) | 1988-06-14 |
Family
ID=31135906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18639086U Pending JPS6391897U (OSRAM) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6391897U (OSRAM) |
-
1986
- 1986-12-03 JP JP18639086U patent/JPS6391897U/ja active Pending
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