JPS6391153U - - Google Patents
Info
- Publication number
- JPS6391153U JPS6391153U JP18721486U JP18721486U JPS6391153U JP S6391153 U JPS6391153 U JP S6391153U JP 18721486 U JP18721486 U JP 18721486U JP 18721486 U JP18721486 U JP 18721486U JP S6391153 U JPS6391153 U JP S6391153U
- Authority
- JP
- Japan
- Prior art keywords
- electrons
- target
- primary electrons
- substrate
- secondary electrons
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 230000007423 decrease Effects 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18721486U JPS6391153U (en, 2012) | 1986-12-04 | 1986-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18721486U JPS6391153U (en, 2012) | 1986-12-04 | 1986-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6391153U true JPS6391153U (en, 2012) | 1988-06-13 |
Family
ID=31137488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18721486U Pending JPS6391153U (en, 2012) | 1986-12-04 | 1986-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6391153U (en, 2012) |
-
1986
- 1986-12-04 JP JP18721486U patent/JPS6391153U/ja active Pending