JPS6390832U - - Google Patents
Info
- Publication number
- JPS6390832U JPS6390832U JP18711186U JP18711186U JPS6390832U JP S6390832 U JPS6390832 U JP S6390832U JP 18711186 U JP18711186 U JP 18711186U JP 18711186 U JP18711186 U JP 18711186U JP S6390832 U JPS6390832 U JP S6390832U
- Authority
- JP
- Japan
- Prior art keywords
- brush
- cleaning
- wafer
- scrubbing
- bristles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005201 scrubbing Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 2
Landscapes
- Brushes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18711186U JPS6390832U (bs) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18711186U JPS6390832U (bs) | 1986-12-03 | 1986-12-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390832U true JPS6390832U (bs) | 1988-06-13 |
Family
ID=31137283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18711186U Pending JPS6390832U (bs) | 1986-12-03 | 1986-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390832U (bs) |
-
1986
- 1986-12-03 JP JP18711186U patent/JPS6390832U/ja active Pending