JPS6390827U - - Google Patents

Info

Publication number
JPS6390827U
JPS6390827U JP18624786U JP18624786U JPS6390827U JP S6390827 U JPS6390827 U JP S6390827U JP 18624786 U JP18624786 U JP 18624786U JP 18624786 U JP18624786 U JP 18624786U JP S6390827 U JPS6390827 U JP S6390827U
Authority
JP
Japan
Prior art keywords
quartz tube
furnace body
disposed
heater
intermediate cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18624786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0539625Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18624786U priority Critical patent/JPH0539625Y2/ja
Publication of JPS6390827U publication Critical patent/JPS6390827U/ja
Application granted granted Critical
Publication of JPH0539625Y2 publication Critical patent/JPH0539625Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP18624786U 1986-12-03 1986-12-03 Expired - Lifetime JPH0539625Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18624786U JPH0539625Y2 (cg-RX-API-DMAC10.html) 1986-12-03 1986-12-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18624786U JPH0539625Y2 (cg-RX-API-DMAC10.html) 1986-12-03 1986-12-03

Publications (2)

Publication Number Publication Date
JPS6390827U true JPS6390827U (cg-RX-API-DMAC10.html) 1988-06-13
JPH0539625Y2 JPH0539625Y2 (cg-RX-API-DMAC10.html) 1993-10-07

Family

ID=31135629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18624786U Expired - Lifetime JPH0539625Y2 (cg-RX-API-DMAC10.html) 1986-12-03 1986-12-03

Country Status (1)

Country Link
JP (1) JPH0539625Y2 (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPH0539625Y2 (cg-RX-API-DMAC10.html) 1993-10-07

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