JPS6390826U - - Google Patents
Info
- Publication number
- JPS6390826U JPS6390826U JP18703286U JP18703286U JPS6390826U JP S6390826 U JPS6390826 U JP S6390826U JP 18703286 U JP18703286 U JP 18703286U JP 18703286 U JP18703286 U JP 18703286U JP S6390826 U JPS6390826 U JP S6390826U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temperature
- thin film
- hardness
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000011888 foil Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18703286U JPS6390826U (lm) | 1986-12-04 | 1986-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18703286U JPS6390826U (lm) | 1986-12-04 | 1986-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390826U true JPS6390826U (lm) | 1988-06-13 |
Family
ID=31137136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18703286U Pending JPS6390826U (lm) | 1986-12-04 | 1986-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390826U (lm) |
-
1986
- 1986-12-04 JP JP18703286U patent/JPS6390826U/ja active Pending