JPS6390826U - - Google Patents
Info
- Publication number
- JPS6390826U JPS6390826U JP1986187032U JP18703286U JPS6390826U JP S6390826 U JPS6390826 U JP S6390826U JP 1986187032 U JP1986187032 U JP 1986187032U JP 18703286 U JP18703286 U JP 18703286U JP S6390826 U JPS6390826 U JP S6390826U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- temperature
- thin film
- hardness
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986187032U JPS6390826U (enExample) | 1986-12-04 | 1986-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986187032U JPS6390826U (enExample) | 1986-12-04 | 1986-12-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390826U true JPS6390826U (enExample) | 1988-06-13 |
Family
ID=31137136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986187032U Pending JPS6390826U (enExample) | 1986-12-04 | 1986-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390826U (enExample) |
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1986
- 1986-12-04 JP JP1986187032U patent/JPS6390826U/ja active Pending