JPS6390825U - - Google Patents

Info

Publication number

JPS6390825U

JPS6390825U JP18581186U JP18581186U JPS6390825U JP S6390825 U JPS6390825 U JP S6390825U JP 18581186 U JP18581186 U JP 18581186U JP 18581186 U JP18581186 U JP 18581186U JP S6390825 U JPS6390825 U JP S6390825U

Authority

JP

Japan

Prior art keywords

semiconductor wafer

reinforcing material

attached

circular

utility

Prior art date

1986-12-01

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 14
• 239000012779 reinforcing material Substances 0.000 claims description 7
• 235000012431 wafers Nutrition 0.000 description 12
• 239000000853 adhesive Substances 0.000 description 2
• 230000001070 adhesive effect Effects 0.000 description 2
• 238000010586 diagram Methods 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1