JPS6390434U - - Google Patents
Info
- Publication number
- JPS6390434U JPS6390434U JP18651586U JP18651586U JPS6390434U JP S6390434 U JPS6390434 U JP S6390434U JP 18651586 U JP18651586 U JP 18651586U JP 18651586 U JP18651586 U JP 18651586U JP S6390434 U JPS6390434 U JP S6390434U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- purge gas
- protrusion
- gas
- diffuser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 claims description 9
Landscapes
- Filling Or Discharging Of Gas Storage Vessels (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18651586U JPS6390434U (ko) | 1986-12-03 | 1986-12-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18651586U JPS6390434U (ko) | 1986-12-03 | 1986-12-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6390434U true JPS6390434U (ko) | 1988-06-11 |
Family
ID=31136139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18651586U Pending JPS6390434U (ko) | 1986-12-03 | 1986-12-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6390434U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1992015005A1 (en) * | 1991-02-18 | 1992-09-03 | Osaka Sanso Kogyo Kabushiki-Kaisha | Device for sampling gas |
-
1986
- 1986-12-03 JP JP18651586U patent/JPS6390434U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1992015005A1 (en) * | 1991-02-18 | 1992-09-03 | Osaka Sanso Kogyo Kabushiki-Kaisha | Device for sampling gas |