JPS6390397U - - Google Patents

Info

Publication number
JPS6390397U
JPS6390397U JP18528686U JP18528686U JPS6390397U JP S6390397 U JPS6390397 U JP S6390397U JP 18528686 U JP18528686 U JP 18528686U JP 18528686 U JP18528686 U JP 18528686U JP S6390397 U JPS6390397 U JP S6390397U
Authority
JP
Japan
Prior art keywords
substrate
gas flow
fixed electrode
flow hole
inner bottom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18528686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18528686U priority Critical patent/JPS6390397U/ja
Publication of JPS6390397U publication Critical patent/JPS6390397U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
JP18528686U 1986-11-29 1986-11-29 Pending JPS6390397U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18528686U JPS6390397U (enrdf_load_stackoverflow) 1986-11-29 1986-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18528686U JPS6390397U (enrdf_load_stackoverflow) 1986-11-29 1986-11-29

Publications (1)

Publication Number Publication Date
JPS6390397U true JPS6390397U (enrdf_load_stackoverflow) 1988-06-11

Family

ID=31133770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18528686U Pending JPS6390397U (enrdf_load_stackoverflow) 1986-11-29 1986-11-29

Country Status (1)

Country Link
JP (1) JPS6390397U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438489A (en) * 1977-08-31 1979-03-23 Toshiba Corp Fuel rod

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438489A (en) * 1977-08-31 1979-03-23 Toshiba Corp Fuel rod

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