JPS6390220U - - Google Patents
Info
- Publication number
- JPS6390220U JPS6390220U JP18444786U JP18444786U JPS6390220U JP S6390220 U JPS6390220 U JP S6390220U JP 18444786 U JP18444786 U JP 18444786U JP 18444786 U JP18444786 U JP 18444786U JP S6390220 U JPS6390220 U JP S6390220U
- Authority
- JP
- Japan
- Prior art keywords
- frame
- vacuum
- holding frame
- right sides
- support frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002508 contact lithography Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18444786U JPS6390220U (enExample) | 1986-11-29 | 1986-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18444786U JPS6390220U (enExample) | 1986-11-29 | 1986-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6390220U true JPS6390220U (enExample) | 1988-06-11 |
Family
ID=31132131
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18444786U Pending JPS6390220U (enExample) | 1986-11-29 | 1986-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6390220U (enExample) |
-
1986
- 1986-11-29 JP JP18444786U patent/JPS6390220U/ja active Pending