JPS6389967U - - Google Patents
Info
- Publication number
- JPS6389967U JPS6389967U JP18513786U JP18513786U JPS6389967U JP S6389967 U JPS6389967 U JP S6389967U JP 18513786 U JP18513786 U JP 18513786U JP 18513786 U JP18513786 U JP 18513786U JP S6389967 U JPS6389967 U JP S6389967U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- induction coil
- exhaust port
- resistance heating
- frequency induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 230000006698 induction Effects 0.000 claims description 2
- 239000000376 reactant Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18513786U JPS6389967U (cs) | 1986-12-01 | 1986-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18513786U JPS6389967U (cs) | 1986-12-01 | 1986-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389967U true JPS6389967U (cs) | 1988-06-10 |
Family
ID=31133479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18513786U Pending JPS6389967U (cs) | 1986-12-01 | 1986-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389967U (cs) |
-
1986
- 1986-12-01 JP JP18513786U patent/JPS6389967U/ja active Pending