JPS6389236U - - Google Patents

Info

Publication number
JPS6389236U
JPS6389236U JP18391286U JP18391286U JPS6389236U JP S6389236 U JPS6389236 U JP S6389236U JP 18391286 U JP18391286 U JP 18391286U JP 18391286 U JP18391286 U JP 18391286U JP S6389236 U JPS6389236 U JP S6389236U
Authority
JP
Japan
Prior art keywords
cup
suction head
semiconductor wafer
head
suctions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18391286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18391286U priority Critical patent/JPS6389236U/ja
Publication of JPS6389236U publication Critical patent/JPS6389236U/ja
Pending legal-status Critical Current

Links

JP18391286U 1986-11-28 1986-11-28 Pending JPS6389236U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18391286U JPS6389236U (US07923587-20110412-C00022.png) 1986-11-28 1986-11-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18391286U JPS6389236U (US07923587-20110412-C00022.png) 1986-11-28 1986-11-28

Publications (1)

Publication Number Publication Date
JPS6389236U true JPS6389236U (US07923587-20110412-C00022.png) 1988-06-10

Family

ID=31131085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18391286U Pending JPS6389236U (US07923587-20110412-C00022.png) 1986-11-28 1986-11-28

Country Status (1)

Country Link
JP (1) JPS6389236U (US07923587-20110412-C00022.png)

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