JPS6389229U - - Google Patents
Info
- Publication number
- JPS6389229U JPS6389229U JP18472186U JP18472186U JPS6389229U JP S6389229 U JPS6389229 U JP S6389229U JP 18472186 U JP18472186 U JP 18472186U JP 18472186 U JP18472186 U JP 18472186U JP S6389229 U JPS6389229 U JP S6389229U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- liquid gas
- ejection nozzle
- vacuum thin
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18472186U JPS6389229U (enExample) | 1986-11-29 | 1986-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18472186U JPS6389229U (enExample) | 1986-11-29 | 1986-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6389229U true JPS6389229U (enExample) | 1988-06-10 |
Family
ID=31132664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18472186U Pending JPS6389229U (enExample) | 1986-11-29 | 1986-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6389229U (enExample) |
-
1986
- 1986-11-29 JP JP18472186U patent/JPS6389229U/ja active Pending