JPS6388379A - Pneumatically operated valve - Google Patents

Abstract

PURPOSE:To prevent a possibility of dust adhesion at the time of assembly by squeezing an engagement ball inserted into a through hole by means of a tightening ring from outer circumference and pressing the engagement ball into an engagement recess to connect an introduction member with a flow member. CONSTITUTION:Forming a piston rod 7 separately with an introduction member 26 in a direction of air pressure introduction and a flow member 27 in a direction of a flow passage, assembling is performed after securely cleaning the flow member 27 which comes into contact with clean fluid. At the time of assembly, after inserting an engagement column 31 into an engagement cylinder 34, an engagement ball 28 is inserted into a through hole 35 (not shown of fig.) and at the same time the engagement ball 28 is pressed by a tightening ring 36 so that the engagement ball 28 is projected into the engagement cylinder 34 to connect the introduction member 26 with a guide member 27. This makes it possible to engage and fix the introduction member 26 and the flow member 27 by means of a cleaned automatic machine without both of the members coming into contact with hands or the like.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an air-operated valve for controlling the supply of clean fluid to various purpose devices operated using fluid. This makes it easy to clean the parts and prevents contamination of the cleaning fluid during use.

Conventional technology Conventional air-operated valves use the biasing force of a piston that is biased in a certain direction to constantly open a fluid flow path in a valve section provided on a piston rod, and also sense open/close signals to increase air pressure. A normally open air-operated valve changes the fluid flow path from normally open to closed by applying force to the piston against a biasing force, and a valve part provided on the piston rod that normally operates due to the biasing force of the piston. , a normally closed air system that constantly closes the fluid flow path and changes the fluid flow path from normally closed to open by sensing the open/close signal and applying air pressure to the piston against a force of 1 inch. There is an actuated valve. When using pure water, such as that used for cleaning IC boards, as the fluid through which this air-operated valve controls the flow, it is necessary to prepare parts before assembly to prevent contamination with dust, etc. must be thoroughly cleaned. However, since many soft elastic members such as O-rings are used in the valve member, if strong cleaning is performed using ultrasonic waves or the like, these soft elastic members will be destroyed by the ultrasonic waves, which is not preferable. Furthermore, if a soft elastic material such as an O-ring is separated and cleaned, the necessity of assembling the O-ring increases the number of times the component is contacted during assembly, which has the disadvantage that a large amount of dust and the like adheres thereto.

Problems to be Solved by the Invention The present invention relates to an air-operated valve that eliminates the above-mentioned drawbacks, and in which the piston rod has an O-ring or the like that is likely to be damaged by ultrasonic cleaning. The member and the flow member, which comes into contact with clean fluid and is not likely to be damaged by ultrasonic cleaning such as an O-ring, are formed as separate members,
By performing the cleaning work on the introduction member and the distribution member separately during manufacturing, the distribution member that comes into contact with the clean content liquid can be reliably cleaned, and the clean cleaning liquid will not be contaminated. At the same time, by simplifying the assembly work, contact with the members constituting the piston rod during the assembly work is reduced, and the possibility of dust adhesion during assembly is prevented.

Means for Solving the Problems In order to solve the above-mentioned problems, the present invention has the following aims: By setting it open or always closed, and sensing the open/close signal and applying it to the piston against the biasing force of air, the fluid flow path can be kept open or closed at all times! In the case where the piston rod is made up of an introduction member in the air pressure introduction direction and a circulation member in the direction of the flow path, the piston rod is connected to either the introduction member or the circulation member. An engaging column having an engaging concave portion for the engaging ball on its outer periphery is formed, and an engaging tube into which the engaging column is inserted is formed on the other of the introduction member or the flow member, and the engaging ball is inserted into the formed tube. A through-hole is formed through the hole into which the engaging ball can be inserted, and the engaging ball inserted into the through-hole is tightened and pressed from the outer periphery by a tightening ring, and the engaging ball is pressed and engaged with the recessed part of the engaging member 6, thereby communicating with the introducing member. It is made by connecting members.

Function Since the present invention is configured as described above, in the normally open air operated valve, the fluid flow path is always opened and closed by the valve portion connected to the piston rod by the 11 force of the piston. When a signal is sensed, air pressure is applied to the screws against the biasing force, thereby changing the fluid flow path from the normally open state to the closed state. In addition, in a normally closed air-operated valve, the valve part connected to the piston rod always closes the fluid flow path due to the biasing force of the piston, and when an open signal is detected, air pressure is applied against the biasing force. By applying the fluid to the piston, the fluid flow path is changed from a closed state to an open state. Since a long piston rod is formed separately for the introduction member in the air pressure introduction direction and the circulation member in the flow path direction, the circulation member that comes into contact with clean fluid can be reliably cleaned before assembly. . During assembly, insert the engagement post into the engagement tube, then insert the engagement ball into the through hole and press the engagement ball with the tightening ring to secure the engagement ball into the engagement tube. One method is to assemble the engagement ball by protruding inward and engaging it in the engagement recess. In another method, the engagement ball is inserted into the through hole of the engagement piece in advance, the engagement ball is pressed inward by a tightening ring, and the engagement post is strongly inserted into the engagement tube in this state. Another method is to push and insert the third engagement ball against the biasing force of the tightening ring and engage the engagement ball in the engagement recess, thereby assembling the assembly. In the case of this latter method, the introduction member and the distribution member are engaged and fixed by a clean automatic machine without touching with hands, etc., and the members constituting the screw are not brought into contact with each other during assembly work. It is possible to reduce the amount of dust and prevent dust from adhering during assembly.

EXAMPLE Below, the present invention will be described as an example of a normally open air-operated valve that is used in a normally open state. (1) is a cylinder whose upper end is sealed via an O-ring (2). (3)
The upper surface of this sealing body (3) is covered with a lid body (5) provided with an engaging protrusion (4), and a control air inlet (6) is provided on the axial side surface. is formed. Also, inside the cylinder (1) is a piston rod (7).
) on the outer periphery of this piston rod (7),
Two pistons (10) and (11) are fixed to the inner circumference of the cylinder (1) with an O-ring (8) closely attached to them, and these pistons (10 and 11) are fixed to the cylinder (1). A separator (13) fixed with a ring (12) is used to airtightly divide the control fluid inlet (6), which is opened on the axial side of the cylinder (1), between the two pistons (10). ) (11) respectively formed on the − plane,
It is connected to two inlet chambers (14) (1, 5'). The control fluid is injected into these two inflow chambers (14) and (15) through an introduction path (16) formed in the piston rod (7) in the axial direction from the upper end surface. In the embodiment shown in the figure, a first inlet chamber (14) is formed in the space between the first piston (10) and the sealing body (3), and from this first inlet chamber (14) the piston An introduction path (16) formed in the axial direction from the upper end of the rod (7) opens into the second inflow chamber (15).

Further, the cylinder (1) is rotatably fixed to the main body (17) by connecting and fixing one end to the main body (17) via a lock ring (18), and the cylinder (1) is connected to the main body (17) with the third cylinder. A pressure spring 20) is interposed between the two pistons (11), and this pressure spring (20) causes the first
The second pistons (10) and (11) are biased toward the first and second inlet chambers (14) and (15).

When control air is injected from the inlet (6), the control air moves the pistons (10) and (11) into the suppressing spring (
20) flows in the direction of pressing against the restoring force of 20) and moves the piston rod (7). Further, on the inner periphery of the main body (17), a connecting body (22) having a control fluid flow path (21) is provided.
) is screwed and fixed via a threaded part (23), and inside this connecting body (22) is a valve part (22) fixed to a piston rod (7).
24) is positioned so as to face the opening/closing part (25) of the flow passage (21) so that the flow passage (21>) is not normally closed.

The piston rod (7) is formed by an introduction member (26) in the direction of the pistons (10) and (11) that introduces air pressure, and a communication member (27) in the direction of the flow path (21). 27), an engagement post (31) is formed with engagement recesses (two) on the outer periphery for engaging the engagement ball (28). The insertion tip of this engagement column (31) has a narrow tip tapered surface (32) and an engagement recess (29).
) also has an engagement tapered surface 33) that is the engagement side surface of the engagement ball (28), and the formation angle of this engagement taper surface (33) is set to be smaller than the formation angle of the tip tapered surface (32). , is steeply angled with respect to the axis of the engaging piece pillar (31). Also, the engaging cylinder (34) into which this 1 series pillar 31 is inserted is engaged.
) is formed in the introduction member (26) of the piston rod (7), and a plurality of through holes (35) into which the engaging balls (28) can be inserted are formed through the engaging cylinder (34) at appropriate intervals. The engagement ball 28) formed and inserted into the through hole <35) is held by an annular tightening ring (36) with a cutout part <39) made of a linear metal material such as stainless steel material. , by tightening and pressing from the outer periphery and pushing the engagement ball (28) into the engagement recess (29), the introduction member (26) and the circulation member (27)
is connected to. Further, a tightening ring (36) is attached to the outer periphery of the engagement tube (34) that connects the plurality of through holes (35).
An annular groove (
37).

In addition, the flow member (27) has a valve portion (24) fixed to a screw (40) that protrudes through a fixing plate (38) on the opposite side of the engagement column (31), and the valve portion (24) is fixed to the screw (40). and fixed plate (38)
In between, the central part of a metal diaphragm (41) made of a material such as stainless steel is fixed, and the outer periphery of this metal diaphragm (41) is connected to the main body (17) and the connecting body (22).
By fixing the piston in between, the piston < 10) (11) direction and the flow path (21) direction are liquid-tightly divided, and the flow path (2
1) The flowing clean control fluid is protected from being contaminated by contact with the piston rod (7) in the direction of the introduction member (26).

In addition, on the side of the cylinder (1) on the side of the cylinder (1) on the side where the pistons (10) (11) press and release the pistons (10) (11),
1) is formed, but this is not necessarily necessary when the sliding distance of the pistons (10) and (11) is short.

In the structure as described above, the piston rod (
To assemble 7), first, the introduction member (26) and the circulation member (27) are cleaned separately.

This cleaning consists of a flow member (2
7) e Be sure to clean the introduction member (26) as appropriate without damaging the large number of O-rings (2) and (8) used. This cleaning was done
The introduction member (26) and the circulation member (27) are assembled by inserting the engagement column (31) into the engagement tube (34) and then inserting the engagement ball (28) into the through hole (35). By inserting it and pressing the engagement ball (28) with the tightening ring (36) to project the engagement ball (28) into the engagement tube (34),
One method is to assemble the engagement balls (31) by engaging them in the engagement recesses (two).

In another method, the engagement ball (28) is inserted in advance into the through hole (35) of the engagement tube (34), and the tightening ring (3
In step 6), the engagement ball (28) is pressed inward, and in this state, the engagement post (31) is strongly inserted from the tapered surface (32) into the engagement tube 34), thereby making the engagement possible. Ball (28)
are pushed apart against the biasing force of the tightening ring (36), and the engagement ball (2) is pressed against the engagement tapered surface (33) of the engagement recess (29).
Another method is to assemble by engaging 8). In the case of this latter method, the introduction member 26) and the circulation member 27) can be engaged and fixed by a clean automatic machine without touching them with hands, etc., and the piston rod (7) is formed. Reduce the contact of parts during assembly work, and use circulating parts during assembly (27)
This can prevent dust from adhering to the surface.

In this latter assembly, the engaging tapered surface (
33) is made steeper with respect to the axis of the engaging column (31) than the forming angle of the tip tapered surface (32), so that the tip tapered surface (32) is formed at a steeper angle than the forming angle of the tip tapered surface (32).
The forming angle is such that the engaging tapered surface (
33) is set at an angle that makes it difficult to press the engaging ball (28) outward, it is possible to ensure that separation of the introduction member (26) and the circulation member (27) during operation will not occur. This allows for easy assembly. Further, in the above embodiment, the introduction member (26) was provided with the engagement tube (34), and the circulation member (27) was formed with the engagement post (31), but in other different embodiments, this was reversed. However, there is no problem.

To explain the operation of the air-operated valve configured as described above, the screws 1 to (10) (11) are normally operated by the pressing spring (20).
) of the valve portion (2) of the piston rod (7).
4) keeps the control fluid flow passage (21) open at all times, and when the close signal is received, the cylinder (1)
The control fluid is supplied from the control fluid inlet (6) opened to the
If the control fluid is allowed to flow into the two inlet chambers (14) <15) formed between the two pistons (10) and (11), the control fluid pressure will be applied to the two pistons (10 and 11). , the pressure receiving area of the piston (10) < 11) is nearly twice that of the case of - pistons, and a large output can be generated in the valve part (24) via the piston rod (7). Flow path < 21) f: Even when the flowing fluid is at high pressure,
The opening/closing part (25) of the flow passage (21) can be easily opened and closed by the valve part (24).
) can be closed.

In the above embodiment, an embodiment in which the present invention is used as a normally open air operated valve has been described, but in A f used as a normally open air operated valve, the first piston (10) and the sealing body are (3) A pressing spring (20) with a pressing force that allows the opening/closing part (25) to be easily closed at all times by the valve part (24) against the pressure of the fluid flowing through the flow path (21) is interposed between (3) However, an inflow chamber (14)<15) is formed on the side facing this pressing force. That is, the first piston (10) and the separator (
13) between the first inflow chamber (14) and the second piston (
A second inflow chamber (15) is located between the book (11) and the book (17).
) is formed.

In this normally closed air IP valve, when a valve opening signal is sensed and control fluid is injected from the inlet (6), the control fluid flows through the two pistons (10) and (11) formed between the two pistons (10) and (11). control fluid pressure is applied to the two pistons (10) (11), and the control fluid pressure is applied to the two pistons (10) (11).
The pressure-receiving area of 11) is nearly twice that of the case with - screws, and a large output can be generated in the valve part (24) via the piston rod (7), and the pressure spring Even if the restoring force of (20) is strong, the flow path (21)
The opening/closing part (25) can be opened.

Further, in the above embodiment, the piston and the inflow chamber are two parts.
Although the case of three or more is shown, it is of course possible to use a plurality of three or more, and in this case, even greater output can be obtained.

Effects of the Invention As described above, the present invention allows a piston rod to be brought into contact with an introduction member having an O-ring, etc., which may be damaged by ultrasonic cleaning, and a clean fluid that may damage the O-ring, etc. by ultrasonic cleaning. By forming the safe flow member and the flow member as separate members and performing the cleaning work for the introduction member and the flow member separately during manufacturing, it is possible to reliably clean the flow member that comes into contact with the clean content liquid. This prevents contamination of the cleaning solution and simplifies the assembly process, reducing contact with the piston components during assembly and reducing the possibility of dust particles adhering during assembly. It can be prevented. Also, during this assembly,
Insert the six engagement balls into the through hole of the engagement tube in advance, press the engagement balls inward with the tightening ring, and in this state firmly insert the engagement column into the engagement tube to release the engagement balls. It is possible to push the tightening ring apart and insert it against the force of the tightening ring, and to engage the engagement ball in the engagement recess, without touching the introduction member and the circulation member with your hands, etc., making it possible to clean the automatic It can be fixed firmly by machine,
It is possible to reduce the contact between the members constituting the piston during assembly work, and to reliably prevent dust from falling during assembly.

[Brief explanation of the drawing]

The drawings show one embodiment of the present invention. No. 1r7I is a sectional view of a normally open air-operated valve, FIG. 2 is an enlarged sectional view of the connection state of the introduction member and the flow member, and FIG. It is a sectional view taken along the line A-A. (7)... Piston rod (10) (11)... Piston (21)... Flow path (24)... Valve section (2
6)...Introduction parts (27)... Distribution parts (28)
...Engagement balls (2)...Four engagement parts (31)...
・Engagement column

Claims (7)

[Claims] (1) Due to the biasing force of the piston that is biased in a certain direction,
A valve part installed on the piston rod changes the fluid flow path from always open to always closed, and by sensing an open/close signal and applying air pressure to the piston against the biasing force, the fluid flow path is changed from normally open to closed. state or from normally closed to open state, the piston rod is formed by an introduction member in the air pressure introduction direction and a circulation member in the flow path direction,
An engagement column having an engagement recess for an engagement ball on the outer periphery is formed on either the introduction member or the circulation member, and an engagement tube into which the engagement column is inserted is attached to either the introduction member or the circulation member. A through hole into which the engaging ball can be inserted is formed in the engaging tube, and the engaging ball inserted into the through hole is tightened and pressed from the outer periphery by a tightening ring to tighten the engaging ball. 1. An air-operated valve, characterized in that an introduction member and a circulation member are connected by press-fitting into an engagement recess. (2) The air-operated valve according to claim 1, wherein the tightening ring is formed of an annular elastic metal material with a portion cut out. (3) The air-operated valve according to claim 1, wherein the engagement cylinder is provided on the introduction member of the piston rod. (4) The air-operated valve according to claim 1, wherein the engagement cylinder is provided in a circulation member of the piston rod. (5) The air-operated valve according to claim 1, wherein the engaging column is provided on the introduction member of the piston rod. (6) The air-operated valve according to claim 1, wherein the engaging column is provided on a circulation member of the piston rod. (7) The tip of the engagement column inserted into the engagement cylinder has a tapered tip with a narrow tip width, and the engagement recess also has a tapered engagement surface on the side surface where the engagement ball engages. 7. The air-operated valve according to claim 1, wherein the angle at which the tapered surface is formed is larger than the angle at which the tapered end surface is formed.