JPS638805A - Self-contained correcting device for stereoscopic pantograph - Google Patents

Abstract

PURPOSE:To automatically correct the motion error of the output end of a stereoscopic pantograph during the work using the pantograph by incorporating a correcting device in the stereoscopic pantograph itself. CONSTITUTION:The lower part of a core bar solid part 10 is fixed to a bottom base 12, and a load table 13 is provided on the core bar solid part 10, and plural turning and elevating optical apparatus 15 and 16 are arranged on the about center position of the core bar solid part and the load table. Optical principal points of these optical apparatus are set on axial lines Z1 and Z2 of vertical cylinders, and the device is so set that optical paths given by turning and elevation of respective optical apparatus are directed to a target point on an output pedestal E performing a corresponding XYZ motion. The difference between coordinate value of the target point on the output pedestal and actual values is measured, and the input XYZ motion is corrected in accordance with this measured value to correct the space error of the pedestal. Thus, the correcting operation is automatically performed even when the hand of a manipulator set to an outward face S0 of the pedestal is operated in an outside operation area.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a self-contained calibration device for a three-dimensional pantograph suitable for use in robots and the like.

[Summary of the invention]

According to the present invention, by incorporating a calibration device into the three-dimensional pantograph itself, it is possible to automatically correct motion errors at the output end of the three-dimensional pantograph while the three-dimensional pantograph is being used.

[Conventional technology]

As a robot control method using a manipulator mounted on a three-dimensional pantograph, there is a system that was previously invented and filed by the inventor of the present invention (Japanese Patent Application No. 1494-1982).
(See No. 89). According to this control method, the spatial deviation (error) of the posture movement of the robot hand can be automatically corrected by DDA calculation, so the teaching operation by man-machine control is easy, and the robot movement can be easily determined from the drawing. It is possible to produce an NC tape, and it is also possible to automatically correct the difference between the planned value and the actual value of the target position using a visual sensor at the hand. Therefore, by placing a standard scale in the external area, the robot hand can be calibrated.

[Problems to be Solved by the Invention] However, the above-described calibration method cannot be performed while the robot is working, and cannot correct errors that occur during the work. Further, since the calibration standard scale is installed in the outside world where the robot hand operates, it is inconvenient that it cannot be permanently installed on a moving robot.

Therefore, the object of the present invention is to improve the X and Y of the pedestal (output stand) at the output end of a three-dimensional pantograph.

The purpose of the present invention is to measure deviations from a reference included in a pantograph mechanism at 23-dimensional positions and to automatically perform a calibration operation.

[Means and effects for solving the problems] 1) Description of the three-dimensional pantograph The three-dimensional pantograph has been described in detail in the above patent application, but the outline of the three-dimensional pantograph will be described once again with reference to FIGS. 1 to 3. Figure 3 (a).

(B) and (C) show the magnification effect of the three-dimensional pantograph. (A) shows its X-direction movement, (B) shows its Y-direction movement, and (C) shows its Z-direction movement. The expansion effect of each is shown. Figures 3(a) and 3(b) show the movement of the output point F with respect to the X and Y movements of the input point A on the XY table of the drive section at the bottom of the three-dimensional pantograph. As shown in these figures, the motion of output point F is always the same as that of input point A.

Each has a constant ratio and is parallel to the Y motion.

FIG. 3(c) shows the Z movement of the input point on the Z stage of the lower drive section of the three-dimensional pantograph. As shown in the figure, the motion of the output point F has a constant ratio and is parallel to the Z motion of the input point.

Now, let the x, y, and Z direction movements of input points A and D be X^, Y^, and ZD, respectively, and the X of output point F.

If the y- and Z-direction movements are respectively represented by XF, YF, and Zp, the following equation holds true.

, Subsequently, in order to position the output point F of this three-dimensional pantograph on a pedestal (output platform) whose attitude is regulated, a triple-row quadrilateral as shown in FIG. 2 is constructed. That is, the first parallelogram GI HI CL At and the second parallelogram 11 JL FI C1 include a common point C, and the sides HIC1 and CL11 are right angles (HICllCllll)
The intermediate point B1 of the side AlC1 and the side C
The midpoint E1 of IF1 is the third parallelogram BICI EI
It is coupled to the Z motion input point D1 by DI. At the same time, the first
When the input side ClAl of the parallelogram including the input point A1 is connected to the horizontal motion plane XY (Z constant), this triple quadrilateral including the input point D1 is constrained within the same plane.

As a result, the output side JL Fl including the output point F1 is always parallel to the Z-line and perpendicular to the X-ray. Then, two such triple-row quadrilateral link mechanisms are provided symmetrically at a constant interval. That is, as shown in the plan view of FIG. 1(A), G2H2C2A2 is symmetrically expressed in the first parallelogram
12 J2 F2C2 is provided symmetrically to Ct, and an input point D2 is provided symmetrically to input point D1.

In this case, the zero position of the Y-Y axis is set at the center of the bi-triple quadrilateral, and the XYZ coordinate values of Dl and D2 are DI,
If D1v+ Dtz and D2X+ D2Yl 022, then D12=D22. Each becomes constant at DIX=D2M. By constructing such a symmetric triple parallelogram mechanism, the PI F2 line connecting both output points is DI
It is parallel to the 02 line, and therefore parallel to the Y line. Therefore, the quadrilateral JI composed of JI Fl , J2 F2
J2 F2 Ft is Jx Ft in the Z direction, JIJ2
is oriented in the Y direction, and the direction perpendicular to this quadrilateral is oriented in the X direction. Therefore, if a rectangular parallelepiped with this quadrilateral as one side is configured as a pedestal E, as shown in FIG. . The pedestal E whose posture is regulated in the three-dimensional XYZ directions moves in space by magnifying the XYZ motion input to the lower part of the puncture graph by the magnification m shown in equation (2). In FIGS. 1(a) and 1(b), the range of motion is shown by a dashed line, and this range of motion is shown as an outward spatial range as seen from the pedestal E of the bitrilateral row-quadrilateral mechanism. Therefore, if the shoulder portion of the manipulator (indicated by a broken line) is attached to the outward facing surface So of the pedestal E, the hand portion of the manipulator will operate the object to be worked on within the outward facing space.

2) Means for solving the problem (Fig. 1) In the above-mentioned three-dimensional pantograph, a core body is provided in the vertical cylindrical space between the double-triple quadrilateral mechanisms, and its lower part is connected to the bottom base. At the same time, a loading table is provided above the three-dimensional pantograph at an upper position away from the moving plane of the three-dimensional pantograph, and a plurality of optical devices that perform rotation and elevation movements are arranged at approximately the center of this mandrel body and on the loading table. . The optical principal points of these optical instruments are arranged on the vertical cylinder axis, and the optical path given by the rotation and elevation movement of each optical instrument is directed to a target point on the output pedestal that performs the corresponding XYZ movement. Set.

Then, the difference between the coordinate value and the actual value of the target point on the output pedestal is measured, and the input XYZ interlock is corrected based on this measured value to correct the spatial error of the pedestal.

3) Function By providing the automatic calibration device as described above inside the three-dimensional pantograph mechanism, the calibration operation can be performed automatically even when the hand of the manipulator attached to the outward facing surface So of the pedestal at the output end of the three-dimensional pantograph is working in the external operation area. It will be held in

〔Example〕

Figure 1 is a schematic diagram showing the main parts of an embodiment of the present invention, where (a) is a plan view showing only the three-dimensional pantograph, and (b) is a plan view showing only the three-dimensional pantograph.
is an elevation view. When the inside of the mechanism of the three-dimensional pantograph mentioned above is viewed from pedestal E, the bitrilateral quadrilateral is as follows.
As shown by the broken line and solid line in Figure 1, the rain vertical input point DL
It can be seen that parallel link motion is performed in contact with a vertical cylindrical space having a diameter corresponding to the distance between D2. Then, paying attention to the point where the pedestal quadrilateral JL J2 F2 Ft is always located in front of this vertical cylindrical space shown by the broken line in FIG. The lower part (11) is fixed to the bottom base (12) by bending it into the flat position of a hook, and the loading table (13) is installed at a position 1 away from the mechanism movement surface at the upper part. Central cavity of the real part (10) and loading table (13)
At the top, support tubes (15) and (16) for optical instruments that perform rotation and elevation movements, respectively, are arranged.

These optics! A pedestal E whose optical principal points Q and Vl (V2 will be described later) of the instrument are placed on the upper vertical cylindrical axis Z1 and Z2 lines, and the optical paths given by the rotation and elevation movements of the respective optical instruments make corresponding XYZ movements. The apparatus is set to point at the upper target point P1, and is configured to measure the difference between the coordinate values of the target point and the actual values to correct the input XYZ movement. MeR, Msn in Figure 1
, MAT, MNT are optical equipment support casings (15),
(16) This is a motor for turning and lifting up and down, and these will be described later.

FIG. 4 is an explanatory diagram regarding the optical path of the optical device. 1st
In order to consider the relationship between the optical path QP and VIPl in the figure, the coordinates of the target point P are XY with the 71st point on the 21-22 line as the origin.
In the Z system, it is assumed that PL (XI )'+2). Now, as optical devices, a television camera T1 with an optical principal point at the V principal point, a laser projector R with an optical axis principal point at the Q point, and a display light point at a target point P1 on the inward surface Si of the pedestal, Let the distance between two points Q and VL on the Z knee 22 line be t.

The optical path directed from fixed points Q and V+ on two vertical lines to a target point P1 on the inward surface Si of the pedestal moving in the XYZ space is:
The rotation angle 0 and θR1 of the television camera Ti on the 11 points and the laser projector R on the Q point, and the depression and elevation angles δ and δR, the coordinate values x, y, z of the PL point and the distance t1 between the points VL and Q. It is determined. Here, TV camera T1
The turning angles of the laser projector and the laser projector R are always the same, and this is set to θ (i.e., θ - 〇 = θ).

FIG. 5 is an explanatory diagram of the spatial error at the output end of the three-dimensional pantograph, and FIG. 5 (a) and (b) show the monitor screen by the television camera T1. In these figures, the horizontal line passing through both centers O is η-〇-η', the vertical line is ζ-0-ζ',
In FIG. 4, the optical axis direction of the television camera in a plane perpendicular to both centers is 1ξ, and the three orthogonal axes are vl-ξη.

Considering the relationship between these and the Vi-XYZ system set earlier, the former has an intermediate coordinate system (X'Y' Z) rotated by θ around the latter two axes, and then its Y' coordinate axis (which is the η axis). ) is rotated by 6 pieces. Therefore, the direction cosine between each axis of the XYZ system and ξηζ system is
It is determined by θ and 6 guns.

Now, if there is no error in the spatial position of the target point P1, that is, the light point of the laser beam on the pedestal inward surface Si is 2.
When it matches one display light point, 21 points are displayed in both centers O on the monitor screen @! (marker point) and the image of the laser light point should both match.

Then, if the actual position of target point P1 does not match the planned position and is at point P1', the error vector is Ps p1
' = ΔP, which is expressed as (ΔX, Δy, Δ2) and (Δξ) by the XYZ system and the ξηζ system, respectively.

ΔP(ΔX, Δy, Δz)=ΔP(Δξ, Δη, Δζ). Also, the correlation between each error value is XYZ
The direction cosine value between each axis of the system and the ξηζ system is θ.

Since it can be expressed as δT, it becomes as follows.

That is, from equation (3), if Δξ, Δη, and Δζ are given, ΔX, Δy, and Δ2 can be calculated.

Among these spatial errors of the target point P1, the Δη and Δζ errors are displayed as P1' on the monitor screen as shown in Figure 5 (a).
Signal points are Δη and Δζ from both centers 0 left and right, and up and down, respectively.
Since the image is displayed with a deviation of 100 kHz, it can be measured by measuring the optical image on the TV screen. On the other hand, the Δξ error cannot be measured on the monitor screen because of the error in the optical axis direction of the television camera. However, when Δξ=0, the illumination point by a laser beam whose optical axis intersects with the viewing axis of the television camera coincides with both centers O, but when Δξ≠0, the laser beam point coincides with the center O. As shown in FIG. 5(b), ζζ'ζ' passes through both monitor centers O and deviates from both centers by ε. This ε value can be displayed and measured on a monitor screen. However, this ε value corresponds to the orthographic shadow on the monitor screen of the distance error Δξ' from the specified position measured in the laser optical axis direction, and is not the error value Δξ itself in the camera optical axis direction. However, since the intersection angle between the camera viewing axis and the laser optical axis is known, the conversion from Δξ' to Δξ can be easily performed. These relationships can be easily understood from FIG. 5(c), which shows the relationship between the camera visual axis, the laser optical path, and the actual plane of the target point P1 in a vertical plane including six elevation angles. Note that the 22 points in FIG. 5(a) will be described later.

In addition, in FIG. 4, it has been explained that the position display and position measurement of both the display light point of the target point P1 on the pedestal inward surface Si and the laser projection point are performed on the same monitor screen for convenience. Even if point 71 and the principal point P on the central vertical line of the inward facing surface si of the pedestal are moved up and down while maintaining their relative relationship, there will be no change in the previous theory; therefore, in reality, the display light point and a separate monitor to display the laser light spot. Therefore, as shown in FIG. 1(b), the optical principal point v2 of the television camera T1 explained in FIG. 72 points and the corresponding display light point P on the pedestal vertical line are determined, and one more point is added to these 72 points.
One camera T2 is provided and used to display and measure the position of 22 points, and the camera T1 of 71 points is used to display and measure the position of the point where the laser beam from point Q is projected onto the pedestal E. With this configuration, the difference between the planned value and the actual value of the target point P1 on the pedestal is Δξ, Δη, which is the deviation from the center position of the target point display image and the laser beam spot image on the two monitors.

By substituting these values into equation (3), the differences ΔX, Δy, and Δ2 between the planned and actual spatial positions of the pedestal can be obtained.

FIG. 6 shows a specific configuration example of a three-dimensional pantograph robot using the present invention, in which (a) is a front view, (b) is a plan view, and (b) is a plan view. J (c) is a side view.

In these figures, parts corresponding to those in FIG. 1 are given the same reference numerals. FIG. 7 is an electrical system diagram showing the flow of measurement control of the one shown in FIG. As shown in Figure 6,
A three-dimensional pantograph is composed of two horizontally parallel triple parallelogram links, each of which is constrained within one plane (vertical plane). One is the first parallelogram AICIHIC
1, Combined right triangle CtlIHz, second parallelogram CI
FI JL 11 and 3rd parallelogram BLDIRICI
and the other is the first parallelogram A2C2H2G2
, combined right triangle C212H2, second parallelogram C2F
2 J2 12 and third parallelogram B2 D2 E2
Consists of C2. The XY inputs G1At and G2A2 are coupled to an XY motion section driven by motors Mx and My, and the Z inputs D1 and D2 are coupled to a Z motion section driven by motor MZ. The pedestal E at the output end is normalized in attitude (the six orthogonal faces of the pedestal are X and Y, respectively).
, refers to a state that is perpendicular to the Z3 axis,) and
The XYZ movement of the input end performs spatial movement magnified by a predetermined magnification. In FIGS. 6(a) and 6(b), this expanded spatial movement range is shown by a chain line. Note that the manipulator shoulder of the robot is attached to the outward facing surface So of the pedestal E, as shown by the broken line.

The self-contained calibration device is as already described in Figure 1,
I will add some explanation. The above-mentioned three-dimensional pantograph double triple quadrilateral is constrained in vertical planes parallel to each other, and the vertical cylindrical space (
It has a diameter corresponding to the distance between both vertical input ends DI02.

) and performs rotational parallel motion. The space in front of this cylindrical space (indicated by diagonal lines in the opposite direction in Figure 6 (b)) is:
It is blocked by the inward facing surface Si of the pedestal E. The lower part (11) of the mandrel body part (10) provided in such a vertical cylindrical space
) is bent to the prostrate position of the hook and fixed to the bottom base 1 (12), and the loading table (13) is placed at a position away from the upper mechanism movement surface.
will be established. Optical equipment support casings (15) and (16), which are capable of pivoting and elevation movements, are provided in the central cavity of the mandrel body (10) and on the loading table (13), respectively. One support case (15) is equipped with a laser projector R driven by a turning motor M Bps elevation motor MAR, and the other support case (16) is equipped with a laser projector R driven by a turning motor M6 with a ZL Z2 line as an axis. Two television cameras T1 and T2 are mounted on a tower.The two television cameras T1 and T2 perform the same rotational movement as shown in FIG. Laser projector R, television camera Ts, each optical principal point Q of T2
.

Both VL and V2 are the vertical axis Z1-2 of the cylindrical space.
Make sure it is on the 2nd line.

The distance between the points Q V 1 is tl, and the distance between the points VIV2 is t2. The optical path given by the rotation and elevation movement of each optical device R and T1 is directed to the target point P1 on the vertical line of the inward surface Si of the pedestal E that performs the corresponding XYZ movement, and the optical path of the television camera T2 is Similarly, it is controlled to point toward point P2 (see explanation in FIG. 7). In this case, the 21 points are representative points on the pedestal side of the spatial coordinate values x, y, and z, but are assumed to be virtual points without optical display. On the other hand, 22 points are displayed as light points. Moreover, PxP2=t2.

First, if there is no error in the actual position of pedestal E that performs XYZ motion in space, the laser beam point from laser projector R is at point P1 of pedestal E, and television camera T
The image point coincides with both centers of the monitor screen of TV camera T2, and the image of the light point F2 coincides with both centers of the monitor screen of television camera T2. Next, the actual position of the pedestal has a spatial error ΔP(Δ
X, ΔyΔ2), if this is expressed as τ theory (Δξ, Δη, Δζ) in vertical, horizontal, and vertical ξηζ systems on the monitor screen, then the monitor screen of the television camera T2 (Fig. 5 (a) The horizontal and vertical deviations Δη and Δζ of the F2 light spot from the planned position are displayed as deviations from 0 in both centers, and the monitor screen of the television camera T1 (see Figure 5 (b)) shows the planned position. The orthographic shadow ε of the distance error Δξ' of the laser optical path, which corresponds to the vertical deviation Δξ of the laser beam, is displayed as a deviation from both centers O.

These deviation values are calculated as Δξ, Δη, Δ by the monitor image processing computer (image processor) CP in FIG.
It is determined as a ζ value, and then converted into ΔX, Δy, and Δ2 by the conversion control unit TU, so that correction operations can be performed on the pedestal XYZ movement. These operations will be collectively explained later with reference to FIG.

In addition, regarding the self-calibration operation during the XYZ movement of the pedestal E, point Q+ on the reference vertical line ZL Z2
QPL, VI connecting Vl + v2 and points Pl, P2 on the vertical line of the inward surface Si of the posture normalization pedestal E
It is desirable that the lines Pl, V2, and F2 extend over the entire range of spatial motion of the pedestal without blind spots. However, in this organization, as stated at the beginning,
The two parallel vertical planes formed by the bitrilateral quadrilateral of the three-dimensional pantograph are circumscribed in a vertical cylindrical space with the ZI 22 line as the axis, and are performing rotational and parallel movements corresponding to the movement of the pedestal E. The vertical plane including the fixed ZI Z2 vertical line and the PI F2 vertical line of the Si surface of the movable pedestal E is the parallel vertical 2
It is an intermediate plane that bisects a plane. This shows that the calibration operation described above is performed over the entire range of motion of the pedestal without blind spots.

In FIG. 7, Mx and MY are motors that drive the input XY movement table of the three-dimensional pantograph robot, and M2 is a motor that drives the input Z movement table.

The XYZ displacement movement at the input end becomes an xyz movement magnified by m times at the output end pedestal E. Is the laser projector R equipped with a rotation motor Ml? R1 is driven by the elevation motor MAR, and the TV camera T1 and T2 support casings are driven by the rotation motor M.
e7, driven by the elevation motor MET. On the other hand, in the central computer CC, data regarding the robot arm operation object line coordinate values, robot arm posture, etc. are input, and a format command is created. A command block signal is sent from the central computer CC to the DDA calculator DDC, which performs DDA calculations and sends command pulses ΔXQ, Δyo, Δ20 . Δθ, Δδ
a.

Output ΔδR. Among these, ΔXD+ ΔVo
.

Δ2D passes through the pulse synthesizer PMX to become composite signals Δx4°Δyt, Δzt, and is amplified by the first power unit PU1 to become ΔX, ΔY, ΔZ, and becomes M.

Drive the My and Mz motors, expand the displacement with a three-dimensional pantograph, and apply x, y, and
Gives z displacement. At the same time, the Δθ, ΔδR1 Δδ signal directly drives the motor MeR1MSR for the laser projector R via the second power unit PU2, and directs the laser beam to 21 points.

In addition, the Δθ and ΔδT signals are sent to the motors MeT and MET for the support casing of the television cameras Tl and T2 via PU2.
is also driven, and the visual axis of the TV camera T1 is set to 21 on the St screen.
At this point, the viewing axis of the television camera T2 is directed to 22 points on the screen St.

The vertical deviation ε is displayed on the T1 monitor screen as shown in FIG. 5(B), and the horizontal and vertical deviations Δη and Δζ are displayed on the T2 monitor screen as shown in FIG. 5(A).

These error information values are detected and processed by the image processor CP to become Δξ, Δη, and Δζ signals, and converted into XYZ system correction pulses ΔX, Δy, and Δ by the conversion control unit TU.
2 is calculated. These modified pulses are led to another input of the pulse synthesizer PMX, and are combined with the ΔXD+Δyo+Δ20 signals from the DDA calculator DDC mentioned above to produce Δxt, Δyt.

ΔX via PUI (first power unit)
, ΔY, and ΔZ for each drive motor MX.

My, Mz is input, and input XYZi! ! ! The movement is automatically corrected and the error of the pantograph output end pedestal E is corrected.

The above is a specific example of calibrating and compensating for errors in the actual XYZ position of the pedestal during movement in a dynamic state where the manipulator/robot attached to the pedestal is performing continuous NC operations on the target line array. I talked about it. On the other hand, when a robot arm is used for three-dimensional measurement or assembly work, it moves from point to point and errors occur in a static state, so it is necessary to correct errors in a dynamic state. No, for such cases, XYZ
An error table of the pedestal is created in advance by the built-in calibration device of the present invention based on the movement, and the XYZ output values can be corrected in response to the robot NC command using this table. When creating such an error table, it is not necessary to perform XYZ motion at high speed, so highly accurate measurement is possible, and it is also easy to create several tables using the manipulator load condition as a parameter. It is.

〔Effect of the invention〕

1) Since it is a built-in calibration device, there is no need to provide an external calibration device, and errors due to the load of the robot arm during work and delay errors due to inertia during movement can be automatically corrected.

2) There is an advantage that a static error correction table for XYZ motion can be created at any time.

3) The built-in calibration device operates normally in relation to the base even when work is performed on a moving object with the entire device mounted on a moving platform.

[Brief explanation of the drawing]

Fig. 1 is a schematic diagram showing the main parts of an embodiment of the present invention, Fig. 2 is an explanatory diagram showing the principle of posture regulation of the output end of the three-dimensional pantograph used in the present invention, and Fig. 3 is an explanatory diagram showing the enlargement effect of the three-dimensional pantograph. FIG. 4 is an explanatory diagram of the optical path of the optical equipment used in the present invention, FIG. 5 is an explanatory diagram of the spatial error at the output end of the stereoscopic pantograph, and FIG. 6 is a specific diagram of the pantograph robot using the present invention. FIG. 7 is an electrical system diagram showing the flow of measurement control of the robot shown in FIG. 6. QI HICIA (G2 H2C2A2)...
・First parallelogram, GIAl (G2 A2)...
・The XY motion input side, ILJ engineering F engineering Ct (12J
2 F202 )...Second parallelogram, JI Fl
(J2 F2)... Its output side, HICt It
(H2C2I2)...Right triangle, C1 (C2
)...its right angle vertex, BtDIEICl (B2
D2 E2 C2)...Third parallelogram, Dl(D2
)...Z motion input end, E...output pedestal, (1
0) ... Mandrel body part, (11) ... Its lower part, (1
2)...Bottom base, (13)...Loading table, R
, Ti. T2...Multiple optical instruments, Q, Vl, V2...Optical principal point, ZI Z2...Vertical cylinder axis, Pl...Target point, (x, y, z)...Target point Coordinate value, (X+Δ
x1y+Δy, z+Δ2)...Actual value.

Claims (1)

[Scope of Claims] A first parallelogram whose side is an input side held in a horizontal plane and subjected to XY motion; a second parallelogram whose side is an output side held in the vertical direction; A right triangle that shares two horizontal and vertical sides that are opposite to the input side and output side of the two parallelograms, respectively, and the middle of each side of the first and second parallelograms that are joined at the right angle apex of this right triangle. 2 that shares the two sides of the length to the point and is opposite to the two sides.
A plane-constrained triple parallelogram mechanism consisting of a third parallelogram with the connecting point of the sides as the Z motion input end is arranged symmetrically at regular intervals, and the output sides are connected to each other to form a quadrilateral and output. In a three-dimensional pantograph in the form of a pedestal, a mandrel body is provided in the vertical cylindrical space between the bi-triple parallelogram mechanisms, the lower part of which is fixed to the bottom base, and the upper part of the mandrel is fixed at a position away from the pantograph movement plane. A loading table is provided, and a plurality of optical instruments that rotate and move up and down are arranged on the mandrel body part and the loading table, the optical principal points of these optical instruments are placed on the vertical cylinder axis, and each optical instrument is The device is set so that the optical path given by the interlocking rotation and elevation of the pantograph is directed to a target point defined on the output pedestal of the pantograph that moves in response to the input XYZ movement, and the coordinate value of the target point on the output pedestal is determined. A self-contained calibration device for a three-dimensional pantograph that corrects the spatial error of the output pedestal by measuring the difference between the output pedestal and the actual value through the optical device and correcting the input XYZ motion based on the measured value. .