JPS6387757U - - Google Patents
Info
- Publication number
- JPS6387757U JPS6387757U JP18181386U JP18181386U JPS6387757U JP S6387757 U JPS6387757 U JP S6387757U JP 18181386 U JP18181386 U JP 18181386U JP 18181386 U JP18181386 U JP 18181386U JP S6387757 U JPS6387757 U JP S6387757U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- aperture
- aperture holes
- electron microscope
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 description 1
Description
第１図は本案の実施例の断面図、第２図は本案
の実施例のプレートの平面図、第３図は従来のプ
レートの平面図、第４図は第１図のプレート・歯
車部の拡大図である。
１…電子ビーム、２…電子顕微鏡筒、３ａ…プ
レート（実施例）、３ｂ…プレート（従来例）、
４…絞り穴、５…プレート取付穴、６…歯車部、
７…Ｌ形支持軸、８…ピニオン、９…歯車棒、１
０…プレート回転方向切換ダイヤル、１１…ビー
ム中心方向切換ダイヤル、１２…可動絞り本体、
１３…電子源、１４…可動絞り導入口。
Fig. 1 is a sectional view of the embodiment of the present invention, Fig. 2 is a plan view of the plate of the embodiment of the invention, Fig. 3 is a plan view of the conventional plate, and Fig. 4 is the plate/gear portion of Fig. 1. It is an enlarged view. 1... Electron beam, 2... Electron microscope tube, 3a... Plate (example), 3b... Plate (conventional example),
4... Throttle hole, 5... Plate mounting hole, 6... Gear part,
7... L-shaped support shaft, 8... Pinion, 9... Gear rod, 1
0...Plate rotation direction switching dial, 11...Beam center direction switching dial, 12...Movable aperture body,
13...electron source, 14...movable aperture inlet.
Claims (1)
の切り換えを行なうためにプレートを移動させる
ことができる機構から成る電子顕微鏡の可動絞り
装置において、プレートの形状を円盤形とし、プ
レート面内の円周上に複数個の絞り穴を配置し、
絞り穴の切り換えはプレート面をプレートの中心
軸のまわりに回転させることにより行なうことを
特徴とする電子顕微鏡の可動絞り装置。 In a movable aperture device for an electron microscope, which consists of a plate with a plurality of aperture holes arranged thereon and a mechanism that can move the plate to switch the aperture holes, the shape of the plate is disk-shaped, and the circumference within the plane of the plate is Place multiple aperture holes on the top,
A movable aperture device for an electron microscope, characterized in that the aperture holes are switched by rotating the plate surface around the central axis of the plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18181386U JPS6387757U (en) | 1986-11-28 | 1986-11-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18181386U JPS6387757U (en) | 1986-11-28 | 1986-11-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6387757U true JPS6387757U (en) | 1988-06-08 |
Family
ID=31127028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18181386U Pending JPS6387757U (en) | 1986-11-28 | 1986-11-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6387757U (en) |
-
1986
- 1986-11-28 JP JP18181386U patent/JPS6387757U/ja active Pending