JPS6386646U - - Google Patents
Info
- Publication number
- JPS6386646U JPS6386646U JP18107886U JP18107886U JPS6386646U JP S6386646 U JPS6386646 U JP S6386646U JP 18107886 U JP18107886 U JP 18107886U JP 18107886 U JP18107886 U JP 18107886U JP S6386646 U JPS6386646 U JP S6386646U
- Authority
- JP
- Japan
- Prior art keywords
- counting
- replacement time
- counting means
- power source
- replacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18107886U JPS6386646U (bg) | 1986-11-27 | 1986-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18107886U JPS6386646U (bg) | 1986-11-27 | 1986-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6386646U true JPS6386646U (bg) | 1988-06-06 |
Family
ID=31125622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18107886U Pending JPS6386646U (bg) | 1986-11-27 | 1986-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6386646U (bg) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0524967A (ja) * | 1991-07-23 | 1993-02-02 | Shin Etsu Handotai Co Ltd | 単結晶棒育成装置の消耗品管理方法及び装置 |
-
1986
- 1986-11-27 JP JP18107886U patent/JPS6386646U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0524967A (ja) * | 1991-07-23 | 1993-02-02 | Shin Etsu Handotai Co Ltd | 単結晶棒育成装置の消耗品管理方法及び装置 |
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