JPS6386515A - Housing for extra-high voltage mercury lamp - Google Patents
Housing for extra-high voltage mercury lampInfo
- Publication number
- JPS6386515A JPS6386515A JP61232693A JP23269386A JPS6386515A JP S6386515 A JPS6386515 A JP S6386515A JP 61232693 A JP61232693 A JP 61232693A JP 23269386 A JP23269386 A JP 23269386A JP S6386515 A JPS6386515 A JP S6386515A
- Authority
- JP
- Japan
- Prior art keywords
- lamp
- voltage
- housing
- current
- reduced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 title claims abstract description 14
- 229910052753 mercury Inorganic materials 0.000 title claims abstract description 12
- 238000009423 ventilation Methods 0.000 claims abstract description 9
- 238000001514 detection method Methods 0.000 claims description 5
- 238000001228 spectrum Methods 0.000 claims 1
- 238000009825 accumulation Methods 0.000 abstract description 2
- 230000006378 damage Effects 0.000 abstract description 2
- 238000005286 illumination Methods 0.000 abstract 3
- 238000004781 supercooling Methods 0.000 abstract 2
- 238000001816 cooling Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は半導体装置等の製造工程において、紫外線を照
射する装置のための超高圧水銀ランプ用ハウジングに関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a housing for an ultra-high pressure mercury lamp for a device that irradiates ultraviolet rays in the manufacturing process of semiconductor devices and the like.
［従来の技術］
半導体装置を製造するために用いられる各種パターンは
フォトリソグラフィによって形成されるが、このフォト
リソグラフィにおける光源とじて超高圧水銀ランプ（以
下ランプと略寸）が使用されている。ランプは強い紫外
線を放射するので、ハウジングの中へ入れて点灯する。[Prior Art] Various patterns used to manufacture semiconductor devices are formed by photolithography, and an ultra-high pressure mercury lamp (hereinafter simply referred to as a lamp) is used as a light source in this photolithography. The lamp emits strong ultraviolet rays, so it is placed inside the housing and turned on.
点灯中のランプは紫外線と共に高熱を発するので、ハウ
ジング内部は充分に換気して冷却する必要が必る。冷却
の方法としては自然換気と強制換気かめる。Since a lit lamp emits ultraviolet rays and high heat, the inside of the housing must be sufficiently ventilated and cooled. Cooling methods include natural ventilation and forced ventilation.
［発明が解決しようとする問題点］
上述し従来の冷却方法は冷却条件が一定で必るため、ラ
ンプの形状、特にランプのバルブの大きさか一定の場合
は正常に点灯できるか、ランプにバラツギがあったり仕
様変更等でバルブの大きさが変った場合、あるいはラン
プメーカーを変えることによってランプ形状が変ってし
まう場合はハウジングの設計時の熱条イ１から外れて点
灯か不安定になるという欠点かあった。[Problems to be Solved by the Invention] As mentioned above, the conventional cooling method requires constant cooling conditions, so if the shape of the lamp, especially the size of the lamp bulb, is constant, there may be variations in the lamp, such as whether it can be lit normally or not. If the size of the bulb changes due to a change in specifications, or if the shape of the lamp changes due to a change in lamp manufacturer, the housing may deviate from the heat strip 1 when it was designed, causing unstable lighting. There were some drawbacks.
すなわち、冷却が弱ければランプ自体に熱が蓄積されて
ランプの歪が大きくなり、ついに破裂してしまい、冷却
が強すぎればランプ内で完全に蒸発ずべき水銀の一部に
未蒸発の部分か生じてランプか安定動作できず照度が不
安定になってしまつていた。In other words, if the cooling is too weak, heat will accumulate in the lamp itself, increasing the distortion of the lamp and eventually causing it to explode.If the cooling is too strong, some of the mercury that should have completely evaporated inside the lamp may be left unevaporated. As a result, the lamp could not operate stably and the illuminance became unstable.
本発明の目的は内部に収容したランプの点灯条件を安定
化しうるハウジングを提供することにある。An object of the present invention is to provide a housing that can stabilize the lighting conditions of the lamp housed inside.
［発明の従来技術に対する相違点］
上述した従来の冷却条件が一定であるランプハウジング
に対して、本発明によるランプハウジングはランプの点
灯状態を検出して冷却条件を変え、ランプの点灯条件を
最適にするという独創的内容を有する。[Differences between the invention and the prior art] In contrast to the above-mentioned conventional lamp housing where the cooling conditions are constant, the lamp housing according to the present invention detects the lighting state of the lamp and changes the cooling conditions to optimize the lighting conditions of the lamp. It has an original content of making it.
［問題点を解決するだめの手段］
本発明は電源部よりランプ電圧またはランプ電流を検出
する検出部と、検出したランプ電圧またはランプ電流に
応じてハウジング内の換気量を調整する機構とを有する
ことを特徴とする超高圧水銀ランプ用ハウジングである
。[Means for Solving the Problems] The present invention includes a detection section that detects lamp voltage or lamp current from a power supply section, and a mechanism that adjusts the ventilation amount in the housing according to the detected lamp voltage or lamp current. This is a housing for an ultra-high pressure mercury lamp.
［実施例］ 次に本発明の実施例について図面を参照して説明する。[Example] Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明の要部断面図である。電源７から高周波
高電圧をハウジング１内のランプ２に印加すると、ラン
プ２内に放電が起こり水銀蒸気圧が次第に高まって点灯
状態になる。ランプ２から発した紫外光はリフレクタ−
３によってコールドミラー５に集光され被露光物に導ひ
かれる。第２図（ａ）、 （ｂ）は電圧を印加したとき
から点灯か安定するまでのランプ電圧、ランプ電流を示
１ノたものでおる。第２図（ａ）、 （ｂ）に示すよう
に、ランプ電圧は徐々に上がりランプ電流は徐々に下が
る。例えば３５０Ｗのランプでは、ランプ電圧は約６０
ｖ１ランプ電流は５．５〜６△で安定する１、ところか
、過冷却の状態ではランプ電圧は充分上がりきらず、従
ってランプ電流も下がりきらないため、ランプは定格ま
で電力が供給されず照度か−１からない。FIG. 1 is a sectional view of a main part of the present invention. When a high frequency and high voltage is applied from the power source 7 to the lamp 2 in the housing 1, discharge occurs within the lamp 2, and the mercury vapor pressure gradually increases, resulting in a lighting state. The ultraviolet light emitted from lamp 2 is reflected
3, the light is focused on a cold mirror 5 and guided to the object to be exposed. Figures 2(a) and 2(b) show the lamp voltage and lamp current from the time the voltage was applied until the lamp was lit or stabilized. As shown in FIGS. 2(a) and 2(b), the lamp voltage gradually increases and the lamp current gradually decreases. For example, in a 350W lamp, the lamp voltage is approximately 60W.
The v1 lamp current stabilizes at 5.5 to 6△1. However, in a supercooled state, the lamp voltage cannot rise enough and therefore the lamp current cannot fall enough, so the lamp is not supplied with power to its rated value and the illuminance decreases. Not from -1.
例えばランプ電圧３０Ｖ、ランプ電流９Ａではランプに
２７０ＷＬか電力が加わらない、。For example, if the lamp voltage is 30V and the lamp current is 9A, then 270WL or no power will be applied to the lamp.
（実施例１）
そこで本発明に係る実施例１は定格より低いランプ電圧
を検出部１１で検出して、ハウジング１を換気している
ファン４に加わっている電圧をツアン制御部６て下げ、
ファン４の回転を制御するものである。ファン４の回転
数が下がると、ハウジング１内の換気が弱くなり、ラン
プ２の温度が上がって水銀蒸気圧が上がり、ランプ電圧
が上がり、定格電力の下に照度が適正に維持される。(Embodiment 1) Therefore, in Embodiment 1 according to the present invention, the detection unit 11 detects a lamp voltage lower than the rated voltage, and the voltage applied to the fan 4 that ventilates the housing 1 is lowered by the fan control unit 6.
It controls the rotation of the fan 4. When the rotation speed of the fan 4 decreases, the ventilation within the housing 1 becomes weaker, the temperature of the lamp 2 increases, the mercury vapor pressure increases, the lamp voltage increases, and the illuminance is maintained properly under the rated power.
（実施例２）
次に本発明の実施例２を説明する。本発明の実施例２″
Ｃは上述した様にハウジング１内の換気はファン４を回
転させることにより上部開口部１０がら空気を取り入れ
て行なう。ランプ２の点灯状態を電源７から検出部１１
により検出しランプ電圧またはランプ電流が定格になる
ようにシャッター制御部８によりシャッター９の開閉を
行なって開口面積を調整する。(Example 2) Next, Example 2 of the present invention will be described. Example 2 of the present invention
As mentioned above, ventilation in the housing 1 is carried out by rotating the fan 4 to take in air through the upper opening 10. The lighting state of the lamp 2 is detected from the power source 7 by the detection unit 11
The shutter control unit 8 opens and closes the shutter 9 to adjust the opening area so that the detected lamp voltage or lamp current becomes the rated value.
本実施例ではランプ電圧が３５Ｖまでしか上がらなかっ
たランプを使用したときに開口面積を従来の１１５にす
ると、ランプ電圧は５８Ｖまで上がり照度が安定した。In this example, when a lamp whose lamp voltage could only rise to 35V was used, and the aperture area was set to 115, which is the conventional value, the lamp voltage rose to 58V and the illuminance became stable.
［発明の効果］
以上説明したように本発明は超高圧水銀ランプ用ハウジ
ングの換気量を制御することにより、冷却条件を調整し
てランプの点灯条件を最適化できる。すなわち、熱蓄積
によるランプの破壊や過冷却による照度不安定かなくな
り、安定した露光ができる効果を有するものである。[Effects of the Invention] As explained above, the present invention can optimize the lighting conditions of the lamp by adjusting the cooling conditions by controlling the ventilation amount of the ultra-high pressure mercury lamp housing. In other words, it has the effect of eliminating lamp destruction due to heat accumulation and instability of illuminance due to overcooling, and allowing stable exposure.
第１図は本発明の要部断面図、第２図（ａ）、 （ｂ）
はランプ電圧・ランプ電流の時間変化である。
１・・・ハウジング ２・・・超高圧水銀ランプ
３・・・リフレクタ−４・・・ファン
５・・・コールドミラー ６・・・ファン制御部７・
・・電源 ８・・・シャッター制御部９・
・・シャッター １０・・・開口部１１・・・検
出部Fig. 1 is a sectional view of the main part of the present invention, Fig. 2 (a), (b)
is the change in lamp voltage and lamp current over time. 1...Housing 2...Ultra high pressure mercury lamp 3...Reflector 4...Fan 5...Cold mirror 6...Fan control section 7.
...Power supply 8...Shutter control section 9.
...Shutter 10...Aperture 11...Detection part
Claims (1)
ランプを収納するハウジングにおいて、電源部よりラン
プ電圧またはランプ電流を検出する検出部と、検出した
ランプ電圧またはランプ電流に応じてハウジング内の換
気量を調整する機構とを有することを特徴とする超高圧
水銀ランプ用ハウジング。(1) In a housing that houses an ultra-high pressure mercury lamp that has a bright line spectrum that is strong in the ultraviolet region, there is a detection unit that detects lamp voltage or lamp current from the power supply unit, and ventilation inside the housing according to the detected lamp voltage or lamp current. A housing for an ultra-high pressure mercury lamp, characterized by having a mechanism for adjusting the amount.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61232693A JPS6386515A (en) | 1986-09-30 | 1986-09-30 | Housing for extra-high voltage mercury lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61232693A JPS6386515A (en) | 1986-09-30 | 1986-09-30 | Housing for extra-high voltage mercury lamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6386515A true JPS6386515A (en) | 1988-04-16 |
Family
ID=16943298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61232693A Pending JPS6386515A (en) | 1986-09-30 | 1986-09-30 | Housing for extra-high voltage mercury lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6386515A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5696623A (en) * | 1993-08-05 | 1997-12-09 | Fujitsu Limited | UV exposure with elongated service lifetime |
| FR2762382A1 (en) * | 1997-04-22 | 1998-10-23 | Philips Electronics Nv | LIGHT GENERATOR FOR OPTICAL FIBERS |
| JP2006510174A (en) * | 2002-12-11 | 2006-03-23 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Lighting unit |
| JP2014210430A (en) * | 2013-04-04 | 2014-11-13 | 株式会社東通研 | Ultraviolet ray radiation device |
-
1986
- 1986-09-30 JP JP61232693A patent/JPS6386515A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5696623A (en) * | 1993-08-05 | 1997-12-09 | Fujitsu Limited | UV exposure with elongated service lifetime |
| FR2762382A1 (en) * | 1997-04-22 | 1998-10-23 | Philips Electronics Nv | LIGHT GENERATOR FOR OPTICAL FIBERS |
| EP0874190A1 (en) * | 1997-04-22 | 1998-10-28 | Koninklijke Philips Electronics N.V. | Light generator for optical fibers |
| JP2006510174A (en) * | 2002-12-11 | 2006-03-23 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Lighting unit |
| JP2014210430A (en) * | 2013-04-04 | 2014-11-13 | 株式会社東通研 | Ultraviolet ray radiation device |
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