JPS6385860U - - Google Patents

Info

Publication number

JPS6385860U

JPS6385860U JP18225386U JP18225386U JPS6385860U JP S6385860 U JPS6385860 U JP S6385860U JP 18225386 U JP18225386 U JP 18225386U JP 18225386 U JP18225386 U JP 18225386U JP S6385860 U JPS6385860 U JP S6385860U

Authority

JP

Japan

Prior art keywords

scan stage

sample holder

angle scan

electron

axes

Prior art date

1986-11-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010894 electron beam technology Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 238000010521 absorption reaction Methods 0.000 description 1
• 238000004453 electron probe microanalysis Methods 0.000 description 1

Cited By (2)