JPS6385665U - - Google Patents
Info
- Publication number
- JPS6385665U JPS6385665U JP1986180148U JP18014886U JPS6385665U JP S6385665 U JPS6385665 U JP S6385665U JP 1986180148 U JP1986180148 U JP 1986180148U JP 18014886 U JP18014886 U JP 18014886U JP S6385665 U JPS6385665 U JP S6385665U
- Authority
- JP
- Japan
- Prior art keywords
- platen
- wafer
- arm
- attached
- movable table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180148U JPS6385665U (enExample) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986180148U JPS6385665U (enExample) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6385665U true JPS6385665U (enExample) | 1988-06-04 |
Family
ID=31123840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986180148U Pending JPS6385665U (enExample) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6385665U (enExample) |
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1986
- 1986-11-21 JP JP1986180148U patent/JPS6385665U/ja active Pending