JPS6384954U - - Google Patents
Info
- Publication number
- JPS6384954U JPS6384954U JP17994486U JP17994486U JPS6384954U JP S6384954 U JPS6384954 U JP S6384954U JP 17994486 U JP17994486 U JP 17994486U JP 17994486 U JP17994486 U JP 17994486U JP S6384954 U JPS6384954 U JP S6384954U
- Authority
- JP
- Japan
- Prior art keywords
- insulating
- hook
- electrostatic chuck
- stand
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 210000000078 claw Anatomy 0.000 claims description 2
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17994486U JPS6384954U (enExample) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17994486U JPS6384954U (enExample) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384954U true JPS6384954U (enExample) | 1988-06-03 |
Family
ID=31123451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17994486U Pending JPS6384954U (enExample) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384954U (enExample) |
-
1986
- 1986-11-21 JP JP17994486U patent/JPS6384954U/ja active Pending