JPS6384954U - - Google Patents

Info

Publication number
JPS6384954U
JPS6384954U JP17994486U JP17994486U JPS6384954U JP S6384954 U JPS6384954 U JP S6384954U JP 17994486 U JP17994486 U JP 17994486U JP 17994486 U JP17994486 U JP 17994486U JP S6384954 U JPS6384954 U JP S6384954U
Authority
JP
Japan
Prior art keywords
insulating
hook
electrostatic chuck
stand
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17994486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17994486U priority Critical patent/JPS6384954U/ja
Publication of JPS6384954U publication Critical patent/JPS6384954U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP17994486U 1986-11-21 1986-11-21 Pending JPS6384954U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17994486U JPS6384954U (enrdf_load_stackoverflow) 1986-11-21 1986-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17994486U JPS6384954U (enrdf_load_stackoverflow) 1986-11-21 1986-11-21

Publications (1)

Publication Number Publication Date
JPS6384954U true JPS6384954U (enrdf_load_stackoverflow) 1988-06-03

Family

ID=31123451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17994486U Pending JPS6384954U (enrdf_load_stackoverflow) 1986-11-21 1986-11-21

Country Status (1)

Country Link
JP (1) JPS6384954U (enrdf_load_stackoverflow)

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