JPS6384951U - - Google Patents

Info

Publication number
JPS6384951U
JPS6384951U JP17991186U JP17991186U JPS6384951U JP S6384951 U JPS6384951 U JP S6384951U JP 17991186 U JP17991186 U JP 17991186U JP 17991186 U JP17991186 U JP 17991186U JP S6384951 U JPS6384951 U JP S6384951U
Authority
JP
Japan
Prior art keywords
facing
semiconductor wafer
support body
supports
semicircular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17991186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17991186U priority Critical patent/JPS6384951U/ja
Publication of JPS6384951U publication Critical patent/JPS6384951U/ja
Pending legal-status Critical Current

Links

JP17991186U 1986-11-21 1986-11-21 Pending JPS6384951U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17991186U JPS6384951U (US06521211-20030218-C00004.png) 1986-11-21 1986-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17991186U JPS6384951U (US06521211-20030218-C00004.png) 1986-11-21 1986-11-21

Publications (1)

Publication Number Publication Date
JPS6384951U true JPS6384951U (US06521211-20030218-C00004.png) 1988-06-03

Family

ID=31123392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17991186U Pending JPS6384951U (US06521211-20030218-C00004.png) 1986-11-21 1986-11-21

Country Status (1)

Country Link
JP (1) JPS6384951U (US06521211-20030218-C00004.png)

Similar Documents

Publication Publication Date Title
JPS6384951U (US06521211-20030218-C00004.png)
JPS6230016U (US06521211-20030218-C00004.png)
JPH0184994U (US06521211-20030218-C00004.png)
JPS6330892U (US06521211-20030218-C00004.png)
JPH0184435U (US06521211-20030218-C00004.png)
JPS6237254U (US06521211-20030218-C00004.png)
JPS63150658U (US06521211-20030218-C00004.png)
JPS61124764U (US06521211-20030218-C00004.png)
JPS62201608U (US06521211-20030218-C00004.png)
JPH0399439U (US06521211-20030218-C00004.png)
JPH0472932U (US06521211-20030218-C00004.png)
JPS62141919U (US06521211-20030218-C00004.png)
JPS6223542U (US06521211-20030218-C00004.png)
JPS6297315U (US06521211-20030218-C00004.png)
JPS6283356U (US06521211-20030218-C00004.png)
JPH0472933U (US06521211-20030218-C00004.png)
JPS6441137U (US06521211-20030218-C00004.png)
JPS61112758U (US06521211-20030218-C00004.png)
JPS6214735U (US06521211-20030218-C00004.png)
JPS62143097U (US06521211-20030218-C00004.png)
JPS627342U (US06521211-20030218-C00004.png)
JPS628636U (US06521211-20030218-C00004.png)
JPS62203370U (US06521211-20030218-C00004.png)
JPS6425049U (US06521211-20030218-C00004.png)
JPH0373450U (US06521211-20030218-C00004.png)