JPS6384947U - - Google Patents

Info

Publication number

JPS6384947U

JPS6384947U JP18022786U JP18022786U JPS6384947U JP S6384947 U JPS6384947 U JP S6384947U JP 18022786 U JP18022786 U JP 18022786U JP 18022786 U JP18022786 U JP 18022786U JP S6384947 U JPS6384947 U JP S6384947U

Authority

JP

Japan

Prior art keywords

semiconductor wafer

semiconductor

outer periphery

surface layer

large number

Prior art date

1986-11-21

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 8
• 239000008188 pellet Substances 0.000 claims description 3
• TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
• 239000002344 surface layer Substances 0.000 claims 1