JPS6384018U - - Google Patents
Info
- Publication number
- JPS6384018U JPS6384018U JP17841086U JP17841086U JPS6384018U JP S6384018 U JPS6384018 U JP S6384018U JP 17841086 U JP17841086 U JP 17841086U JP 17841086 U JP17841086 U JP 17841086U JP S6384018 U JPS6384018 U JP S6384018U
- Authority
- JP
- Japan
- Prior art keywords
- guide bar
- guide rail
- pusher
- guide
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 230000032258 transport Effects 0.000 claims 2
Landscapes
- Framework For Endless Conveyors (AREA)
Description
第１図は、本考案にかゝる基板搬送装置の平面
図、第２図と第３図は、本基板搬送装置の側面図
、第４図は第１図の―矢視線に沿う断面図で
ある。
２，３……ガイドレール、１９……ガイドバー
、２１……プツシヤ台、２２……プツシヤアーム
、２３……プツシヤ、２７……プツシヤ用シリン
ダ、２８……ワイヤ、３１……ドグ、２９……ワ
イヤ駆動用モータ。
FIG. 1 is a plan view of the substrate transfer device according to the present invention, FIGS. 2 and 3 are side views of the substrate transfer device, and FIG. 4 is a sectional view taken along the - arrow line in FIG. 1. It is. 2, 3... Guide rail, 19... Guide bar, 21... Pusher stand, 22... Pusher arm, 23... Pusher, 27... Pusher cylinder, 28... Wire, 31... Dog, 29... Wire drive motor.
Claims (1)
ガイドレールに沿つて配設されたガイドバーと、
該ガイドバーに摺動自在に支持され前記ガイドレ
ール上の基板を一方向へ搬送するプツシヤとを備
えた基板搬送装置において、前記ガイドバーをス
プライン軸から形成すると共に該スプライン軸に
前記プツシヤをスプライン歯にて結合し、さらに
前記ガイドバーを回動させる駆動手段を設けたこ
とを特徴とする基板搬送装置。 a guide rail that slidably supports a board; a guide bar disposed along the guide rail;
In the substrate transport device, the pusher is slidably supported by the guide bar and transports the board on the guide rail in one direction, the guide bar is formed from a spline shaft, and the pusher is splined on the spline shaft. 1. A substrate conveyance device, characterized in that the guide bar is coupled with teeth and further includes a drive means for rotating the guide bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17841086U JPS6384018U (en) | 1986-11-20 | 1986-11-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17841086U JPS6384018U (en) | 1986-11-20 | 1986-11-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6384018U true JPS6384018U (en) | 1988-06-02 |
Family
ID=31120515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17841086U Pending JPS6384018U (en) | 1986-11-20 | 1986-11-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6384018U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5241717A (en) * | 1975-09-08 | 1977-03-31 | Gen Electric | Device and method for turbine blade cooling |
-
1986
- 1986-11-20 JP JP17841086U patent/JPS6384018U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5241717A (en) * | 1975-09-08 | 1977-03-31 | Gen Electric | Device and method for turbine blade cooling |