JPS6383757U - - Google Patents
Info
- Publication number
- JPS6383757U JPS6383757U JP17821386U JP17821386U JPS6383757U JP S6383757 U JPS6383757 U JP S6383757U JP 17821386 U JP17821386 U JP 17821386U JP 17821386 U JP17821386 U JP 17821386U JP S6383757 U JPS6383757 U JP S6383757U
- Authority
- JP
- Japan
- Prior art keywords
- image
- sample
- electron microscope
- scanning electron
- enlarged field
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案の一実施例のブロツク図である
。
１……試料微動装置、２……加熱電源、３……
Ｘ，Ｙ偏向電源、４……電圧―電流変換回路、５
……積分回路、６……パルス発生回路。
FIG. 1 is a block diagram of one embodiment of the present invention. 1... Sample fine movement device, 2... Heating power supply, 3...
X, Y deflection power supply, 4...Voltage-current conversion circuit, 5
...Integrator circuit, 6...Pulse generation circuit.
Claims (1)
鏡において、試料を高温加熱した場合の拡大視野
像における定常的な像移動をなくすために、偏向
コイルまたは補正コイルに補正電源より定常的な
電流を供給し拡大視野像の像移動をなくしたこと
を特徴とする走査電子顕微鏡。 In a scanning electron microscope equipped with sample heating in the sample fine movement device, a steady current is supplied from the correction power supply to the deflection coil or correction coil in order to eliminate the steady image movement in the enlarged field of view image when the sample is heated at high temperature. A scanning electron microscope characterized in that image movement of an enlarged field image is eliminated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17821386U JPS6383757U (en) | 1986-11-21 | 1986-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17821386U JPS6383757U (en) | 1986-11-21 | 1986-11-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6383757U true JPS6383757U (en) | 1988-06-01 |
Family
ID=31120139
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17821386U Pending JPS6383757U (en) | 1986-11-21 | 1986-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6383757U (en) |
-
1986
- 1986-11-21 JP JP17821386U patent/JPS6383757U/ja active Pending